{"title":"Physic-technological principles for fabrication of multielement InSb- and InAs-based MIS IR-photodetectors","authors":"G. L. Kuryshev","doi":"10.1109/EDM.2009.5173919","DOIUrl":null,"url":null,"abstract":"The basic physico-technological principles of creating a perfect interface in MIS structures on InSb and InAs, and fabrication of IR-photodetectors, functioning under non-equilibrium depletion mode, on their base are formulated in the present contribution.","PeriodicalId":262499,"journal":{"name":"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDM.2009.5173919","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The basic physico-technological principles of creating a perfect interface in MIS structures on InSb and InAs, and fabrication of IR-photodetectors, functioning under non-equilibrium depletion mode, on their base are formulated in the present contribution.
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