Room-Temperature Terahertz Antenna-Coupled Microbolometers with Titanium Thermistor and Heater

2019 16th International Conference on Quality in Research (QIR): International Symposium on Electrical and Computer Engineering Pub Date : 2019-07-22 DOI:10.1109/QIR.2019.8898200

N. Hiromoto, A. Banerjee, D. Elamaran, M. Aoki, C. Apriono, H. Satoh, E. Bruendermann, E. Rahardjo, H. Inokawa

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引用次数: 3

Abstract

High-detectivity room-temperature terahertz (THz) detectors are expected to be utilized in spectroscopy and imaging for such applications as inspection for safety, nondestructive sensing in industry and construction, noninvasive examination for medicine and pharmacy. We have studied THz antenna-coupled bolometers with titanium (Ti) thermistor and heater fabricated on a high-resistivity silicon (Si) substrate with MEMS structures in order to develop uncooled high-performance sensors. In this paper, we report the study on design, electromagnetic (EM) and thermal simulation, fabrication, experiment of THz-wave measurement, and evaluation of performance for single-detector devices, by which large THz array detectors are easily developed. We have achieved good performance as low noise-equivalent power (NEP) of the orders of 10−11 W/Hz1/2 and response frequency of 5.5 kHz by studying a Ti thermistor with thin meander line for the THz antenna-coupled bolometer.

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带钛热敏电阻和加热器的室温太赫兹天线耦合微辐射热计

高探测率的室温太赫兹(THz)探测器有望用于光谱学和成像，如安全检查、工业和建筑中的无损传感、医学和药学的非侵入性检查等应用。为了开发非制冷高性能传感器，我们研究了在MEMS结构的高电阻硅(Si)衬底上制造钛(Ti)热敏电阻和加热器的太赫兹天线耦合热辐射计。本文报道了单探测器器件的设计、电磁和热模拟、制造、太赫兹测量实验和性能评估等方面的研究，为开发大型太赫兹阵列探测器提供了便利。通过对太赫兹天线耦合辐射热计的细弯曲线Ti热敏电阻的研究，我们获得了低噪声等效功率(NEP)为10−11 W/Hz1/2，响应频率为5.5 kHz的良好性能。

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2019 16th International Conference on Quality in Research (QIR): International Symposium on Electrical and Computer Engineering

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