Macro model of capacitive MEMS accelerometer in CADENCE environment

Abstract

Designing of MEMS devices requires modeling step. Many devices combines mechanical and electrical domains. Very often it is desired to use one simulation tool that allows taking into account both domains. Such functionality has CADENCE environment. In this paper we do such simulations using developed macro model of capacitive MEMS accelerometer. The accelerometer is described in Verilog-A language and placed in electrical schematic that consist of read-out circuit. The simulations were performed for the device z-axis CMOS-integrated acceleration sensor that has been developed in UPC Barcelona. The results of simulations were compared to those obtained by measurements of fabricated device.