Low-noise single Photon Avalanche Diodes in 0.15 μm CMOS technology

L. Pancheri, D. Stoppa
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引用次数: 62

Abstract

Two different Single-Photon Avalanche Diode (SPAD) structures in a standard 0.15-nm CMOS technology are presented. A characterization of the two detectors, having a 10-μm active-area diameter, and monolithically integrated with a passive quenching circuit and a fast comparator is presented. The two devices exhibit respectively a typical dark count rate of 230cps and 160cps, an afterpulsing probability of 2.1% and 1.3% at 30ns dead time, a Photon Detection Probability of 31% and 26 % at λ=470nm and a timing resolution of 170ps and 60ps. The adopted technology is therefore promising for the realization of SPAD-based image sensors with good overall performance.
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采用0.15 μm CMOS技术的低噪声单光子雪崩二极管
提出了两种不同的单光子雪崩二极管(SPAD)结构,采用标准的0.15 nm CMOS技术。介绍了两种具有10 μm有源区直径、单片集成无源淬火电路和快速比较器的探测器的特性。这两种器件的典型暗计数率分别为230cps和160cps,在死区30ns处的后脉冲概率分别为2.1%和1.3%,在λ=470nm处的光子探测概率分别为31%和26%,定时分辨率分别为170ps和60ps。因此,所采用的技术有望实现具有良好综合性能的基于spad的图像传感器。
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