C. M. Andreou, Yiannis Pahitas, Evdokia Pilavaki, J. Georgiou
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引用次数: 4
Abstract
A micro-fluidic gyroscope that mimics the natural vestibular semicircular canals (SCC) is presented. This gyro takes advantage of a hybrid MEMS process that combines micro-fluidic channels on micro-machined glass wafers with active components realized in silicon wafers. The proposed gyro offers significant advantages in terms of power consumption and reliability compared to prior art. The presented structures were fabricated using Infineon MultiMEMS process and the occupied area is 6mm2 including the pads area.
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