The electrical properties of MOS-structures with silicon nanoballs incrusted in SiO2 layer

Artyom A. Voshchenkov, M. Efremov, A. H. Antonenko, Gennady H. Kamayev, V. Volodin, S. Arzhannikova, A. Vishnyakov, D. Marin, A. Gismatulin
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Abstract

Series of nanopowder were manufactured, for which peak was observed in Raman's spectrum. That peak corresponds to Raman scattering on monocrystalline silicon. In photoluminescence spectra broad peaks were observed. That peaks covers range from red to blue. MOS-structures with nanoballs incrusted in SiO2 were manufactured. For those structures, differential Voltage-Capacity (C-V) and Conductivity characteristics with frequency and structure variety were obtained. Significant increase of differential capacity in an accumulation region was observed. Frequency dependence is obvious. Also Static volt-ampere characteristic was obtained with dependence of Temperature and lighting of a sample. Characteristics have diode type. Photo effect observed at room temperature.
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硅纳米球包覆SiO2层的mos结构的电学性能
制备了一系列纳米粉体,并在拉曼光谱中观察到峰值。这个峰对应于单晶硅上的拉曼散射。在光致发光光谱中观察到宽峰。这些峰覆盖了从红色到蓝色的范围。制备了包覆SiO2纳米球的mos结构。对于这些结构,得到了随频率和结构变化的差分电压-容量(C-V)和电导率特性。累积区差异容量显著增加。频率依赖性很明显。还得到了样品的静态伏安特性与温度和光照的关系。特点有二极管型。在室温下观察光效应。
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