{"title":"Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor","authors":"Lin Chen, Hongwei Jing, Zhong-wei Wei, X. Cao","doi":"10.1117/12.2180887","DOIUrl":null,"url":null,"abstract":"A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering Measurements and Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2180887","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology.
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