Y. Kobayashi, S. Okayama, M. Komuro, M. Okano, S. Watanabe, A. Homma
{"title":"Measurement of Nanometer Topography by Scanning Tunneling Microscope","authors":"Y. Kobayashi, S. Okayama, M. Komuro, M. Okano, S. Watanabe, A. Homma","doi":"10.1109/CPEM.1988.671326","DOIUrl":null,"url":null,"abstract":"Scanning tunneling microscopes (STM) of two different types were developed for measurement of nanometer order three-dimensional topography. Topographic maps of fine grid patterns on Si substrate fabricated by focused ion-beam lithography, optical grating and a compact disk stamper were obtained with resolution of around 10 nm by using electrochemically formed tips.","PeriodicalId":326579,"journal":{"name":"1988 Conference on Precision Electromagnetic Measurements","volume":"36 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1988 Conference on Precision Electromagnetic Measurements","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CPEM.1988.671326","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Scanning tunneling microscopes (STM) of two different types were developed for measurement of nanometer order three-dimensional topography. Topographic maps of fine grid patterns on Si substrate fabricated by focused ion-beam lithography, optical grating and a compact disk stamper were obtained with resolution of around 10 nm by using electrochemically formed tips.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
