Zexin Wan, Jianbo Liang, Y. Shimizu, Y. Ohno, Y. Nagai, N. Shigekawa
{"title":"Nanostructural Analysis of Al/β-Ga2O3 Interface Fabricated Using Surface Activated Bonding","authors":"Zexin Wan, Jianbo Liang, Y. Shimizu, Y. Ohno, Y. Nagai, N. Shigekawa","doi":"10.1109/LTB-3D53950.2021.9598385","DOIUrl":null,"url":null,"abstract":"5-μm Al films are bonded to β-Ga2O3 (−201) substrates using surface activated bonding. The nanostructural properties of as-bonded interfaces are examined using transmission electron microscopy and energy dispersive X-ray spectroscopy. 5-nm intermediate layers, which are likely to be due to the surface activation process, are observed.","PeriodicalId":198318,"journal":{"name":"2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LTB-3D53950.2021.9598385","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
5-μm Al films are bonded to β-Ga2O3 (−201) substrates using surface activated bonding. The nanostructural properties of as-bonded interfaces are examined using transmission electron microscopy and energy dispersive X-ray spectroscopy. 5-nm intermediate layers, which are likely to be due to the surface activation process, are observed.
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