Laser micromachining of oxygen reduced graphene-oxide films

Dogan Sinar, G. Knopf, S. Nikumb, A. Andrushchenko
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引用次数: 4

Abstract

Non-conductive graphene-oxide (GO) inks can be synthesized from inexpensive graphite powders and deposited on functionalized flexible substrates using inkjet printing technology. Once deposited, the electrical conductivity of the GO film can be restored through laser assisted thermal reduction. Unfortunately, the inkjet nozzle diameter (~40μm) places a limit on the printed feature size. In contrast, a tightly focused femtosecond pulsed laser can create precise micro features with dimensions in the order of 2 to 3 μm. The smallest feature size produced by laser microfabrication is a function of the laser beam diameter, power level, feed rate, material characteristics and spatial resolution of the micropositioning system. Laser micromachining can also remove excess GO film material adjacent to the electrode traces and passive electronic components. Excess material removal is essential for creating stable oxygen-reduced graphene-oxide (rGO) printed circuits because electron buildup along the feature edges will alter the conductivity of the non-functional film. A study on the impact of laser ablation on the GO film and the substrate are performed using a 775nm, 120fs pulsed laser. The average laser power was 25mW at a spot size of ~ 5μm, and the feed rate was 1000-1500mm/min. Several simple microtraces were fabricated and characterized in terms of electrical resistance and surface topology.
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氧还原氧化石墨烯薄膜的激光微加工
非导电氧化石墨烯(GO)油墨可以由廉价的石墨粉末合成,并使用喷墨印刷技术沉积在功能化的柔性基板上。一旦沉积,氧化石墨烯薄膜的导电性可以通过激光辅助热还原恢复。不幸的是,喷墨喷嘴直径(~40μm)限制了打印的特征尺寸。相比之下,紧聚焦飞秒脉冲激光可以产生精确的微特征,尺寸在2到3 μm之间。激光微加工产生的最小特征尺寸是激光束直径、功率水平、进给速率、材料特性和微定位系统空间分辨率的函数。激光微加工还可以去除电极迹线和无源电子元件附近多余的氧化石墨烯薄膜材料。去除多余的材料对于制造稳定的氧还原氧化石墨烯(rGO)印刷电路至关重要,因为沿特征边缘积聚的电子将改变非功能薄膜的导电性。研究了激光烧蚀对氧化石墨烯薄膜和衬底的影响,采用775nm, 120fs脉冲激光。光斑尺寸为~ 5μm时,平均激光功率为25mW,进给速度为1000 ~ 1500mm/min。制备了几种简单的微迹线,并对其电阻和表面拓扑结构进行了表征。
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