Automated life stand advances nanotechnologies the reliability, aging tests of a flow instrument used to measure, monitor, and, control the chamber temperature
{"title":"Automated life stand advances nanotechnologies the reliability, aging tests of a flow instrument used to measure, monitor, and, control the chamber temperature","authors":"Hamed Ershad, Richard Fertell","doi":"10.1109/SSD.2016.7473720","DOIUrl":null,"url":null,"abstract":"Implementation and Benefits of an Automated Instrumentation System for Reliability, Aging and Accelerated Life Testing of Liquid Flow Rate Measuring Instruments used in Semiconductor Manufacturing Process Control, Chemical Vapor Deposition Chambers, and Nanotechnology design with real-life automated test system. Automated test system collects data, controls key elements, delivers alerts to users, and monitors real time results. The combination of automation and CVD Chamber process control can help stabilize and maintain temperature levels to obtain a higher yield in production and reduce overall energy consumption in the system.","PeriodicalId":149580,"journal":{"name":"2016 13th International Multi-Conference on Systems, Signals & Devices (SSD)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 13th International Multi-Conference on Systems, Signals & Devices (SSD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SSD.2016.7473720","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Implementation and Benefits of an Automated Instrumentation System for Reliability, Aging and Accelerated Life Testing of Liquid Flow Rate Measuring Instruments used in Semiconductor Manufacturing Process Control, Chemical Vapor Deposition Chambers, and Nanotechnology design with real-life automated test system. Automated test system collects data, controls key elements, delivers alerts to users, and monitors real time results. The combination of automation and CVD Chamber process control can help stabilize and maintain temperature levels to obtain a higher yield in production and reduce overall energy consumption in the system.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
