L. Chen, Katherine Shu-Min Li, Ken Chau-Cheung Cheng, Sying-Jyan Wang, Andrew Yi-Ann Huang, Leon Chou, Nova Cheng-Yen Tsai, Chen-Shiun Lee
{"title":"TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning","authors":"L. Chen, Katherine Shu-Min Li, Ken Chau-Cheung Cheng, Sying-Jyan Wang, Andrew Yi-Ann Huang, Leon Chou, Nova Cheng-Yen Tsai, Chen-Shiun Lee","doi":"10.1109/ITC44778.2020.9325237","DOIUrl":null,"url":null,"abstract":"We propose a machine learning based method targeted for accurate wafer defect map classification. The proposed method is referred to as TestDNA-E, as it applies ensemble learning based on improved TestDNA features. Experimental results show that the proposed method achieves high hit rate for each defect type and overall accuracy.","PeriodicalId":251504,"journal":{"name":"2020 IEEE International Test Conference (ITC)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Test Conference (ITC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ITC44778.2020.9325237","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
We propose a machine learning based method targeted for accurate wafer defect map classification. The proposed method is referred to as TestDNA-E, as it applies ensemble learning based on improved TestDNA features. Experimental results show that the proposed method achieves high hit rate for each defect type and overall accuracy.
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