Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab

Abstract

Need for Education Evolved from the IC fabrication community, MEMS lacks a firm foundation in mechanical engineering. Most of the current microdevices are in concept not much more than miniaturized versions of known devices, while the physical behavior is quite different in microscale. For MEMS to fulfill its full potential, engineers need to be trained for microscale engineering. The Ph.D. program in MEMS, a formal major field in the Mechanical and Aerospace Engineering Department of UCLA. was established to address the above issue.