V. Vidya, N. Zamdmer, T. Mechler, K. Onishi, D. Chidambarrao, B. Jeong, Y. Ko, C. H. Lee, J. Sim, M. Angyal, E. Crabbé
{"title":"Design and Analysis of Discrete FET Monitors in 7nm FinFET Product for Robust Technology Validation","authors":"V. Vidya, N. Zamdmer, T. Mechler, K. Onishi, D. Chidambarrao, B. Jeong, Y. Ko, C. H. Lee, J. Sim, M. Angyal, E. Crabbé","doi":"10.1109/ICMTS55420.2023.10094206","DOIUrl":null,"url":null,"abstract":"This paper presents two phenomena captured by product-like analog layout design of experiments (DOEs) that are otherwise difficult to capture in foundry baseline test structures. Such product driven test structures are critical for early detection of yield detractors and robustly validating a technology in a fabless design environment.","PeriodicalId":275144,"journal":{"name":"2023 35th International Conference on Microelectronic Test Structure (ICMTS)","volume":"106 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 35th International Conference on Microelectronic Test Structure (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS55420.2023.10094206","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents two phenomena captured by product-like analog layout design of experiments (DOEs) that are otherwise difficult to capture in foundry baseline test structures. Such product driven test structures are critical for early detection of yield detractors and robustly validating a technology in a fabless design environment.
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