Multi -Layered Thermal Actuator Realization Using Metal Passivated TMAH Micro-Machining

Abstract

This paper presents fabrication of thermally actuated multi-layered micro actuator for out of plane actuation application. Multi-layered actuators are fabricated using ammonium per sulphate based TMAH etching with metal passivation. Multi-layered $[\text{Au}/\text{Si}_{3}\mathrm{N}_{4}/\text{SiO}_{2}]$ micro actuators with straight and cross-heaters are characterized using I-V and LDV measurements. Gold as upper layer of micro actuator is fully protected during the release process. Fundamental mode or resonant frequency of fabricated multi-layered micro actuator is measured by Laser Doppler Vibrometer which is observed around 20 KHz.