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2018 IEEE Electron Devices Kolkata Conference (EDKCON)最新文献

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Crystallographic Growth Pattern of Well-Ordered “ripple-Shaped” Microstructures on Mn Thin Films Mn薄膜上有序“波纹状”微结构的晶体学生长模式
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770456
A. Chanda, J. Sengupta, C. Jacob
A series of investigation were performed on Mn films which were deposited on GaAs substrates by thermal evaporation. The Mn films exhibit a highly ordered ripple-shaped structure with good periodicity, creating an exclusive patterning tool to construct two dimensional arrays of confined microstructures. The influence of the thickness of the Mn film in producing the ripple structure was clearly observed. In addition, the annealing time was considered as the major parameter to control the ordering of the ripple structure. A model for the creation of stress-driven microstructure is also proposed which indicates that Mn thin films grow on GaAs substrates in three stages: in the primary stage, the growth occurs via two-dimensional nucleation process; as the thickness increases, the stress is released by the film via creation of additional surface roughness which produce ripples; and finally an island-like growth occurs because of the non-uniform distribution of stress along the surface of the film.
采用热蒸发法制备了砷化镓衬底上的锰薄膜。Mn薄膜呈现出高度有序的波纹状结构,具有良好的周期性,为构建受限微结构的二维阵列提供了独特的图像化工具。我们清楚地观察到锰膜厚度对波纹结构产生的影响。另外,将退火时间作为控制纹波结构有序度的主要参数。本文还提出了一个应力驱动微观结构的生成模型,该模型表明锰薄膜在GaAs衬底上的生长分为三个阶段:在初级阶段,通过二维成核过程进行生长;随着厚度的增加,薄膜通过产生额外的表面粗糙度来释放应力,从而产生波纹;最后,由于应力沿薄膜表面的不均匀分布,出现了岛状生长。
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引用次数: 0
Effect of High-K Dielectric on Drain Current of ID-DG MOSFET Using Ortiz-Conde Model 高k介电介质对ID-DG MOSFET漏极电流的影响
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770399
A. Deyasi, A. R. Chowdhury, Krishnendu Roy, A. Sarkar
Drain-to-source current of independently-driven double gate (ID-DG) MOSFET is analytically computed following Ortiz-Conde model in sub 100 nm channel length in presence of different high-K dielectrics. Fowler-Nordheim tunneling concept is invoked due to reduced dielectric thickness; and front gate control is tailored to analyze the effect on current and pinch-off voltage. Excellent agreement is observed with published literatures for high front-gate voltage when device is lightly doped; which speaks in favor of the work within dimensional constraints. Percentage change of current considering body effect is estimated for different gate bias. Result speaks in favor of low power analog applications.
采用ortizi - conde模型,分析计算了不同高k介电介质存在下,独立驱动双栅(ID-DG) MOSFET在小于100nm通道长度下的漏源电流。Fowler-Nordheim隧穿概念是由于减少了介电厚度;并对前门控制进行了定制,分析了对电流和引脚电压的影响。器件轻掺杂时的高前门电压与已发表的文献非常吻合;这就支持了在空间限制下的工作。估计了不同栅极偏压下考虑体效应的电流变化百分比。结果有利于低功耗模拟应用。
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引用次数: 6
Stress Analysis in Uniaxially Strained-SiGe Channel FinFETs at 7N Technology Node 单轴应变sige通道finfet在7N技术节点的应力分析
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770446
Tara Prasanna Dash, S. Das, S. Dey, J. Jena, E. Mohapatra, C. K. Maiti
The uniaxial compressive strain has been an indispensable performance booster for p-channel FinFETs. In this work, based on extensive 3D process and device simulations, performance assessment of nanoscale tri-gate FinFETs with uniaxially strained SiGe channel (fin) has been presented. A comprehensive study based on stress tuning parameters is carried out to investigate the possible highest amount of process induced stress transfer to SiGe fin for optimization of device performance. The impact of process induced stress on carrier mobility enhancement in 7nm technology node is another major focus of this study. The stress transfer efficiency is shown for different process conditions with various Ge contents. Technology CAD simulations show that strain in the fin is large for higher Ge contents in the SiGe layer for p-channel FinFETs. For the first time, the conversion of biaxially strained SiGe to uniaxially strained SiGe via process simulation has been demonstrated, and implemented as uniaxial strained-SiGe channel (fin) in tri-gate FinFETs for high performance.
单轴压缩应变已成为p沟道finfet不可缺少的性能提升器。在这项工作中,基于广泛的3D工艺和器件模拟,提出了具有单轴应变SiGe通道(fin)的纳米三栅极finfet的性能评估。为了优化器件性能,本文基于应力调谐参数进行了一项全面的研究,以探讨可能的最大工艺诱导应力转移到SiGe鳍上。工艺诱导应力对7nm技术节点载流子迁移率增强的影响是本研究的另一个重点。在不同的工艺条件和不同的锗含量下,表明了应力传递效率。技术CAD模拟表明,对于p沟道finfet,当SiGe层中Ge含量较高时,翅片中的应变较大。首次通过工艺模拟证明了双轴应变SiGe到单轴应变SiGe的转换,并在三栅极finfet中实现了单轴应变SiGe通道(fin),以获得高性能。
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引用次数: 0
Analysis of Different Characteristics of SOI-TFET with Ge Material as Source Pocket 以Ge材料为源袋的SOI-TFET的不同特性分析
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770221
S. K. Sinha, S. Tripathi, Goutam Chatterjee, Nisarga Chand
For high performance device application SGOI is a better alternative to Si substrate because of its much attractive property. TFET has been proposed as possible alternative to the conventional MOSFET. In this paper, I proposed a novel SGOI Tunnel Field Effect Transistor with VDD = 0.65 Volts, using non local BTBT model for low power VLSI applications. I studied the different aspects of mole fraction of germanium in device which finally affects the characteristics such as sub-threshold swing, Ion $mathrm{I}_{mathrm{o}mathrm{f}mathrm{f}}$ ratio. In this paper optimization at various level of the device is done in their structure, these optimization indicates the result with high $mathrm{I}_{mathrm{o}mathrm{n}}/mathrm{I}_{mathrm{o}mathrm{f}mathrm{f}}$ ratio of $3.39times 10^{9}$ and sub-threshold swing of 37 mV/ decade. In this paper Miller-capacitance and threshold-voltage is also optimized with mole fraction variation of germanium.
对于高性能器件应用,SGOI是硅衬底的更好替代品,因为它具有许多具有吸引力的特性。人们已经提出了TFET作为传统MOSFET的可能替代品。在本文中,我提出了一种新的SGOI隧道场效应晶体管,VDD = 0.65伏,使用非局部tbbt模型用于低功耗VLSI应用。研究了锗在器件中的摩尔分数对亚阈值摆幅、离子{ mathm {I}_{ mathm {o} mathm {f} mathm {f}}$比值等特性的影响。本文对不同级别器件的结构进行了优化,这些优化结果表明,$ mathm {I}_{ mathm {o}} mathm {n}}/ mathm {I}_{ mathm {o}} mathm {f}}$的比值为$3.39乘以$ 10^{9}$,亚阈值摆幅为37 mV/ 10年。本文还根据锗的摩尔分数变化对米勒电容和阈值电压进行了优化。
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引用次数: 3
Stress Tuning in NanoScale FinFETs at 7nm 7nm纳米finfet的应力调谐
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770517
Tara Prasanna Dash, S. Dey, S. Das, E. Mohaptra, J. Jena, C. K. Maiti
In nanoelectronics, the device performance evolution is limited by the down-scaling. Introduction of intentional mechanical stress is a potential mobility booster to overcome these limitations. However, it is essential to properly control the stress during process integration to understand the influence on channel transport. The aim of this work is to study the mechanical stress evolution in a tri-gate FinFET at 7nm technology node using technology CAD (TCAD) simulations. Using stress maps, we analyze the mechanical stress impact on the transfer characteristics of the device. Suitability of TCAD to explore the potential of new innovative strain-engineered device structures for future generations of CMOS technology is demonstrated.
在纳米电子学中,器件性能的发展受到尺寸减小的限制。引入有意机械应力是克服这些限制的潜在流动性助推器。但要了解过程集成过程中应力对通道输运的影响,必须对应力进行合理控制。本工作的目的是利用技术CAD (TCAD)模拟研究7nm技术节点三栅极FinFET的机械应力演化。利用应力图分析了机械应力对器件传递特性的影响。证明了TCAD在探索未来几代CMOS技术的新型应变工程器件结构潜力方面的适用性。
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引用次数: 2
Incorporation of Tensile and Compressive Channel Stress by Modulating SiGe Stressor Length in Embedded Source/Drain Si-FinFET Architecture 在嵌入式源/漏Si-FinFET结构中通过调节SiGe应力源长度来整合拉伸和压缩通道应力
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770404
K. Sinha, Partha Sarathi Gupta, S. Chattopadhyay, H. Rahaman
The effect of Silicon-Germanium (SiGe) volume in an embedded source and drain Si-FinFET device structure has been studied in this article. The study has been carried out thoroughly using the process and device technology computer-aided design (TCAD) simulator from Synopsys. A new technique for incorporating uniaxial tensile stress in the Silicon channel region has been introduced by fractionally SiGe embedded source/drain region in 3-dimensional FinFET architecture. It has been found that when the SiGe length in source/drain regions become equal to the length of gate region from channel-source/drain interface induce maximum tensile stress of 274 MPa in the silicon channel which improves the performance of n-type Field Effect Transistor (FET) devices. However, fully SiGe embedded source/drain region induce conventional compressive channel stress of 513 MPa which helps to increase different performance parameters of p-channel devices. Thus, for the first time, it has been reported that by controlling the stressor length/volume, both tensile and compressive strain can be introduced in the channel of a Si-FinFET device structure. The channel, source/drain, and stressor regions have been observed to control the overall nature and amount of incorporated stress and thus the proposed design is capable of improving the performance of both p-type and n-type FinFETs without any fabrication overhead.
本文研究了硅锗(SiGe)体积对嵌入式源极和漏极硅finet器件结构的影响。本研究采用Synopsys公司的工艺与器件技术计算机辅助设计(TCAD)模拟器进行。在三维FinFET结构中,引入了一种将单轴拉伸应力引入硅沟道区域的新技术,该技术采用分数SiGe嵌入源/漏区。研究发现,当源极/漏极区SiGe长度等于沟道-源极/漏极界面的栅极区长度时,硅沟道中的最大拉应力达到274 MPa,提高了n型场效应晶体管(FET)器件的性能。然而,全SiGe嵌入源漏区会产生513 MPa的常规压沟道应力,这有助于提高p沟道器件的各种性能参数。因此,首次报道了通过控制应力源长度/体积,可以在Si-FinFET器件结构的通道中引入拉伸和压缩应变。已经观察到通道、源/漏极和应力源区域可以控制合并应力的总体性质和数量,因此所提出的设计能够在没有任何制造开销的情况下提高p型和n型finfet的性能。
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引用次数: 2
Hydrostatic Pressure Study of GaAsSbN/GaAs Quantum Well Based Optoelectronic Devices 基于GaAsSbN/GaAs量子阱的光电器件静水压力研究
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770391
I. Mal, D. P. Samajdar, Debamita Roy
In order to investigate the effect of hydrostatic pressure and N impurities on optoelectronic properties of GaAsSbN/GaAs Quantum Well (QW), electronic band structure, band offsets, effective mass of charge carries, relative permittivity and optical gain have been calculated under the vicinity of 16 band k.p Hamiltonian. It has been anticipated that GaAsSbN/GaAs QW system would be a potential candidate for numerous optoelectronic applications such as efficient tandem solar cells, which can cover up the entire regime (850nm to 1850nm) of AM 1.5 spectra, LASER diodes for the potential applications in the 1.3−1.55 μm regime and wide range optical modulators.
为了研究静水压力和N杂质对GaAsSbN/GaAs量子阱(QW)光电性能的影响,在16波段k.p哈密顿量附近计算了电子能带结构、能带偏移量、载流子有效质量、相对介电常数和光增益。预计GaAsSbN/GaAs QW系统将成为许多光电应用的潜在候选者,如高效串联太阳能电池,它可以覆盖AM 1.5光谱的整个范围(850nm至1850nm),激光二极管在1.3 - 1.55 μm范围内的潜在应用和宽范围光调制器。
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引用次数: 0
Analytical Modeling of Drain Current of Junctionless Double Gate Si-MOSFET having Variable Barrier Height Considering Band Non-Parabolicity 考虑带非抛物线性的变势垒高度无结Si-MOSFET漏极电流解析建模
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770470
Gargi Jana, M. Chanda
In this paper a simple analytical model of the drain current of the junctionless double gate junctionless MOSFET with a variable barrier height has been presented. Band non-parabolicity is also assumed to increase the efficacy of the proposed model, applicable for the ultrathin nano devices. Variable barrier height uses intra band tunneling to enhance the ION/IOFF by reducing the off current of the device significantly. Also lower sub-threshold slope can be achieved using this proposed device structure. Simulation shows that the proposed data is matched with the simulated data with high accuracy.
本文给出了可变势垒高度的双栅无结MOSFET漏极电流的简单解析模型。为了提高模型的有效性,还假设了波段的非抛物线性,该模型适用于超薄纳米器件。可变势垒高度利用带内隧道效应,通过显著降低器件的关闭电流来增强离子/IOFF。此外,使用该提出的器件结构可以实现较低的亚阈值斜率。仿真结果表明,所提数据与仿真数据匹配良好,具有较高的精度。
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引用次数: 0
An Efficient Microsensor System for Selective Detection of Methanol Using TiO2 Nanotubes 二氧化钛纳米管选择性检测甲醇的高效微传感器系统
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770428
S. Ghosal, P. Bhattacharyya
11This work is supported by Visvesvaraya Young Scientist Fellowship and CENSe Lab, IISc BangaloreAn integrated micro-heater based $mathrm{TiO}_{2}$ nanotube (NT) device is reported in this paper. Detailed micro-fabrication technique, structural and morphological characterization and sensing performance of the device to different alcohol vapors (e.g. Methanol, Ethanol and 2-Propanol) have been reported. The integrated Ti-Pt based micro-heater (fabricated by DC magnetron sputtering) was used to control the temperature of the sensing material $(mathrm{TiO}_{2}text{NT}]$ for the detection of different test vapors. The Temperature Coefficient of Resistance (TCR) of the sensor was determined by varying the heater temperature (27-200 °C). 500 nm oxide layer was used for the heater insulation thickness. On top of the insulated micro-heater, 100 nm of Ti thin film was sputtered. $mathrm{TiO}_{2}$ nanotubes were prepared by electrochemical anodization method. After detailed characterization, the sensor showed $sim 23.79%, sim 31.02%, sim 49.97%, sim 71.32% text{and} sim 80.39%$ response magnitude in the range of 10–400 ppm of Methanol concentration, at optimized temperature 130 °C. Selectivity study revealed relatively better Methanol sensing performance, compared to that of Ethanol and 2-Propanol.
本文报道了一种基于$ mathm {TiO}_{2}$纳米管(NT)器件的集成微加热器。详细的微加工技术、结构和形态表征以及该装置对不同酒精蒸气(如甲醇、乙醇和2-丙醇)的传感性能已经报道。采用直流磁控溅射法制备Ti-Pt基集成微加热器,控制传感材料$( mathm {TiO}_{2}text{NT}]$的温度,对不同的测试气体进行检测。传感器的温度电阻系数(TCR)通过改变加热器温度(27-200℃)来确定。加热器绝缘厚度采用500nm氧化层。在绝缘微加热器上溅射100 nm的Ti薄膜。采用电化学阳极氧化法制备了$ mathm {TiO}_{2}$纳米管。经过详细表征,在优化温度130℃下,传感器在10-400 ppm甲醇浓度范围内的响应幅度分别为23.79%、31.02%、49.97%、71.32%和80.39%。选择性研究表明,与乙醇和2-丙醇相比,该装置的甲醇传感性能相对较好。
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引用次数: 1
Dependency of fT and fMAX on Various Device Parameters of AIGaN/GaN HEMT AIGaN/GaN HEMT器件参数对fT和fMAX的影响
Pub Date : 2018-11-01 DOI: 10.1109/EDKCON.2018.8770466
N. Paul, S. Singh
Recent improvements in the understanding and fabrication of GaN have led to its application in high frequency communication and high voltage switching systems. Requirement for operation at even higher frequency and voltages is driving the research currently on design of GaN based devices. In this paper, we present the result of our study of two-dimensional (2-D) High Electron Mobility Transistors (HEMTs) based on GaN/AlGaN/GaN heterostructure using Sentaurus TCAD tools. Exhaustive RF simulations were performed to study the effect of various device parameters such as Gate length, Gate-to-Source spacing, Gate-to-Drain spacing, etc. as well as the effect of various Gate shapes such as T-Gate, Y-Gate, etc., on the high frequency performance of the Transistor. Simulation result shows very promising result with fT and fMAX value of 1691.43 GHz and 2650.84 GHz respectively.
近年来对氮化镓的理解和制造的改进使其在高频通信和高压开关系统中得到了应用。对工作在更高频率和电压下的需求推动了GaN基器件的设计研究。本文介绍了利用Sentaurus TCAD工具研究基于GaN/AlGaN/GaN异质结构的二维(2-D)高电子迁移率晶体管(HEMTs)的结果。通过详尽的射频仿真,研究了栅极长度、栅极到源极间距、栅极到漏极间距等器件参数对晶体管高频性能的影响,以及各种栅极形状(T-Gate、Y-Gate等)对晶体管高频性能的影响。仿真结果表明,fT和fMAX分别为1691.43 GHz和2650.84 GHz,结果非常理想。
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引用次数: 0
期刊
2018 IEEE Electron Devices Kolkata Conference (EDKCON)
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