Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI:10.1109/DTIP.2017.7984455

Barnaby Portelli, R. Farrugia, I. Grech, O. Casha, J. Micallef, E. Gatt

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引用次数: 4

Abstract

This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling.

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MOEMS角垂直梳状驱动器电容测量技术

本文介绍了三种测量角梳驱动结构高频工作时电容变化的新技术，其应用包括光学投影微镜。第一种技术使用锁相放大器，通过叠加频率至少比微镜谐振频率高一个数量级的测试信号来测量梳状结构的阻抗。第二个测量装置使用数字化示波器从梳状结构中的瞬时电压和电流测量电容。第三个装置包括一个由高分辨率定位器控制的微探头，以便将镜子倾斜到所需的角度。这允许静态电容测量在不同的镜面偏转使用高精度LCR计。不同装置的测量结果是一致的。通过分析和数值模拟进一步验证了结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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