{"title":"An application of PZT thick films on LTCC substrates: A case study of a resonant pressure sensor","authors":"M. Zarnik, D. Belavic, S. Macek, M. Kosec","doi":"10.1109/ISAF.2008.4693827","DOIUrl":null,"url":null,"abstract":"Lead-zirconate-titanate (PZT) thick films on pre-fired low-temperature co-fired ceramic (LTCC) substrates were characterised and tested for the application of a piezoelectric resonant pressure sensor. The experimentally obtained material parameters for the thick-film (TF) PZT were used in a finite-element (FE) model of the sensor, which was realised in a 3D LTCC structure with a flexible diaphragm. The simulations revealed the trends and helped to optimise the design.","PeriodicalId":228914,"journal":{"name":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2008.4693827","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Lead-zirconate-titanate (PZT) thick films on pre-fired low-temperature co-fired ceramic (LTCC) substrates were characterised and tested for the application of a piezoelectric resonant pressure sensor. The experimentally obtained material parameters for the thick-film (TF) PZT were used in a finite-element (FE) model of the sensor, which was realised in a 3D LTCC structure with a flexible diaphragm. The simulations revealed the trends and helped to optimise the design.
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