Low Loss Ohmic Type Piezoelectric Actuated RF MEMS Switch Designed with PZT and ZnO

Abstract

RF switch is the potential alternative to replace the conventional electronic switch in high-speed applications. In this research, the design of an ohmic type piezoelectric actuated RF switch using two different piezo material such as PZT and ZnO are carried out. The switch is designed initially with the help of mathematical modeling and the modeling results are verified in the simulation environment. The fabrication steps are also highlighted for the switch along with the return loss and insertion loss associated with it.