Wafer Level Fabrication and Packaging of Miniature Combline Filters

Abstract

We will report on HRL Laboratories' progress in developing state-of-the-art, extremely miniature, combline filters. These filters utilize standard semiconductor substrates, and are fabricated and packaged at the wafer-level -this ensures high reproducibility in device performance, and allows large scale production at a significant cost reduction. The salient filter features are: small size, low insertion loss, tunability, high EM isolation, high power handling capability, and high out of band rejection.