{"title":"Thermal imaging of encapsulated LEDs","authors":"D. Kendig, K. Yazawa, A. Shakouri","doi":"10.1109/STHERM.2011.5767216","DOIUrl":null,"url":null,"abstract":"Thermoreflectance imaging is used to obtain 2D temperature maps of encapsulated LED arrays and elements with sub-micron spatial resolution. Typical LED encapsulation is opaque for infrared light, which prevents direct measurement of the semiconductor die with infrared cameras and thermocouples. A lock-in transient imaging technique with a megapixel silicon CCD is used to obtain the thermoreflectance and electroluminescence signals simultaneously. Transient thermal response in different locations of the die is characterized. Different thermal time constants are observed which correspond to various heat transfer mechanisms.","PeriodicalId":128077,"journal":{"name":"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STHERM.2011.5767216","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 17
Abstract
Thermoreflectance imaging is used to obtain 2D temperature maps of encapsulated LED arrays and elements with sub-micron spatial resolution. Typical LED encapsulation is opaque for infrared light, which prevents direct measurement of the semiconductor die with infrared cameras and thermocouples. A lock-in transient imaging technique with a megapixel silicon CCD is used to obtain the thermoreflectance and electroluminescence signals simultaneously. Transient thermal response in different locations of the die is characterized. Different thermal time constants are observed which correspond to various heat transfer mechanisms.