Analysis on parameters of grating eddy current displacement sensor

L. Kun, T. Wei, Zhao Hui, Yang Jingjing
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Abstract

The grating eddy current sensor is based on the principle of lateral eddy current. Its precision is greatly influenced by the coil and reflector parameters. It is important to analyze and optimize those parameters so as to improve the precision. Therefore, it is necessary to make further research on how the sensor nonlinear error is influenced by parameters, such as reflector size, shape and coil turns, so that the sensor can be tuned for more high precision occasions. Models of the coil and reflector of the grating eddy current sensor are established with finite elements method (Maxwell software) in this paper. Reflectors with different size and shape and coils with different turns are simulated and calculated. The analytical results demonstrate that the coil turns should be as many as possible and reflector with semicircular on both sides is better. Besides, the optimal reflector length (the length corresponding to the smallest nonlinear error) has a linear relationship with coil width and length. The research has provided a guide to set reasonable parameters of coil and reflector to improve the precision.
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光栅涡流位移传感器参数分析
光栅涡流传感器是基于横向涡流原理设计的。其精度受线圈和反射器参数的影响较大。对这些参数进行分析和优化是提高测量精度的重要手段。因此,有必要进一步研究反射面尺寸、形状和线圈匝数等参数对传感器非线性误差的影响,以便对传感器进行调优,以适应更高精度的场合。本文利用Maxwell软件建立了光栅涡流传感器线圈和反射器的有限元模型。对不同尺寸形状的反射镜和不同匝数的线圈进行了仿真计算。分析结果表明,线圈匝数应尽可能多,两侧为半圆形的反射镜效果较好。此外,最佳反射器长度(非线性误差最小对应的长度)与线圈宽度和长度呈线性关系。该研究为合理设置线圈和反射器参数,提高测量精度提供了指导。
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