{"title":"Lateral thinking: the challenge of microsystems","authors":"B. Murari","doi":"10.1109/SENSOR.2003.1215238","DOIUrl":null,"url":null,"abstract":"While conventional microelectronics focuses on incremental improvements of a well-established technology, a new frontier in micro technology has appeared that challenges the way designers work, compelling them to think three dimensionally and also to acquire unusual multi-disciplinary skills. Called Micro-Electro-Mechanical Systems (MEMS), this new field combines silicon fabrication techniques borrowed from the world of microelectronics, but applies them in new ways to merge electrical, mechanical, optical and even fluidics elements into a single device. These new devices will not only lead to interesting new applications, but foster the emergence of a new breed of engineer that has a broader knowledge and perhaps also more room for creative thinking.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2003.1215238","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7

Abstract

While conventional microelectronics focuses on incremental improvements of a well-established technology, a new frontier in micro technology has appeared that challenges the way designers work, compelling them to think three dimensionally and also to acquire unusual multi-disciplinary skills. Called Micro-Electro-Mechanical Systems (MEMS), this new field combines silicon fabrication techniques borrowed from the world of microelectronics, but applies them in new ways to merge electrical, mechanical, optical and even fluidics elements into a single device. These new devices will not only lead to interesting new applications, but foster the emergence of a new breed of engineer that has a broader knowledge and perhaps also more room for creative thinking.
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横向思维:微系统的挑战
传统的微电子学关注的是一项成熟技术的渐进改进,而微技术的新前沿已经出现,挑战了设计师的工作方式,迫使他们进行三维思考,并获得不同寻常的多学科技能。这个新领域被称为微机电系统(MEMS),它结合了从微电子世界借鉴的硅制造技术,但以新的方式将它们应用于将电气、机械、光学甚至流体元件合并到一个设备中。这些新设备不仅会带来有趣的新应用,还会培养出一批知识更广泛、或许还有更多创造性思维空间的新工程师。
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