{"title":"Lateral thinking: the challenge of microsystems","authors":"B. Murari","doi":"10.1109/SENSOR.2003.1215238","DOIUrl":null,"url":null,"abstract":"While conventional microelectronics focuses on incremental improvements of a well-established technology, a new frontier in micro technology has appeared that challenges the way designers work, compelling them to think three dimensionally and also to acquire unusual multi-disciplinary skills. Called Micro-Electro-Mechanical Systems (MEMS), this new field combines silicon fabrication techniques borrowed from the world of microelectronics, but applies them in new ways to merge electrical, mechanical, optical and even fluidics elements into a single device. These new devices will not only lead to interesting new applications, but foster the emergence of a new breed of engineer that has a broader knowledge and perhaps also more room for creative thinking.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2003.1215238","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
While conventional microelectronics focuses on incremental improvements of a well-established technology, a new frontier in micro technology has appeared that challenges the way designers work, compelling them to think three dimensionally and also to acquire unusual multi-disciplinary skills. Called Micro-Electro-Mechanical Systems (MEMS), this new field combines silicon fabrication techniques borrowed from the world of microelectronics, but applies them in new ways to merge electrical, mechanical, optical and even fluidics elements into a single device. These new devices will not only lead to interesting new applications, but foster the emergence of a new breed of engineer that has a broader knowledge and perhaps also more room for creative thinking.