E. Iontchev, Radostin Kenov, R. Miletiev, I. Simeonov, Y. Isaev
{"title":"Hardware implementation of quad microelectromechanical sensor structure for inertial systems","authors":"E. Iontchev, Radostin Kenov, R. Miletiev, I. Simeonov, Y. Isaev","doi":"10.1109/ISSE.2014.6887636","DOIUrl":null,"url":null,"abstract":"The paper discusses the hardware implementation of the quad sensor structure and the possibility to improve the noise characteristics of the structure when simultaneously sampling is accomplished. The histograms of the linear and angular accelerations are given to proof the theory of the structure, published in our previous paper. This structure may be manufactured as a single MEMS inertial sensor with better noise parameters.","PeriodicalId":375711,"journal":{"name":"Proceedings of the 2014 37th International Spring Seminar on Electronics Technology","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-05-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2014 37th International Spring Seminar on Electronics Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSE.2014.6887636","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
The paper discusses the hardware implementation of the quad sensor structure and the possibility to improve the noise characteristics of the structure when simultaneously sampling is accomplished. The histograms of the linear and angular accelerations are given to proof the theory of the structure, published in our previous paper. This structure may be manufactured as a single MEMS inertial sensor with better noise parameters.
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