M. Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, N. Horiguchi, Robert M. Karl, Peter C Johnsen, C. Bevis, N. Jenkins, Bin Wang, Xiaoshi Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane
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引用次数: 0
Abstract
We present a tabletop-scale complex-imaging EUV reflectometer that uses grazing- incidence ptychographic imaging to non-destructively determine depth-dependent, spatially-resolved composition with high sensitivity to chemical makeup, thin film layer thickness, interface quality and dopant profiles.
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