{"title":"Providing technology infrastructure for MEMS","authors":"R. Ribas, D. Veychard, J. Karam, B. Courtois","doi":"10.1117/12.341213","DOIUrl":null,"url":null,"abstract":"CMP has been providing infrastructures for integrated circuits manufacturing since 1981. These infrastructures have been extended to provide services for MEMS manufacturing. These services are available to Universities and Companies.","PeriodicalId":318748,"journal":{"name":"Design, Test, Integration, and Packaging of MEMS/MOEMS","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Design, Test, Integration, and Packaging of MEMS/MOEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.341213","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
CMP has been providing infrastructures for integrated circuits manufacturing since 1981. These infrastructures have been extended to provide services for MEMS manufacturing. These services are available to Universities and Companies.
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