Modeling of XeCl excilamps, taking into account of process of halogen regeneration

S. Anufrik, A. Volodenkov, K. Znosko
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Abstract

Kinetic model for XeCl*-molecules active medium of an excilamps, taking into account of the halide donors (HCl, Cl2) regeneration process is presented. Conditions being discussed, when XeCl*-molecules formation and the regeneration dynamics of the halide donors are possible to consider separately.
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考虑卤素再生过程的XeCl模型
提出了考虑卤化物供体(HCl, Cl2)再生过程的XeCl*分子活性介质的动力学模型。在讨论的条件下,XeCl*分子的形成和卤化物供体的再生动力学可以分开考虑。
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