{"title":"Parametric Identification of Contact Forces Using AFM","authors":"E. Abdel-Rahman, A. Nayfeh","doi":"10.1109/ICMENS.2004.122","DOIUrl":null,"url":null,"abstract":"We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2004.122","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.