Polishing of Black and White CVD Grown Polycrystalline Diamond Coatings

Snigdha Roy, V. Balla, A. Mallik, V. Ralchenko, A. Bolshakov, E. E. Ashkinazi
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引用次数: 2

Abstract

Microwave plasma CVD growth can produce black and white varieties of polycrystalline diamond (PCD), depending on their as-grown purity. These two types of PCDs have been polished by mechanical and chemo-mechanical polishing respectively. It has been observed that initial roughness of 2.21μm for white PCD can be brought down to 175 nm after 70 hours of combined polishing, whereas, 85 hours of combined polishing could bring down the high initial roughness of 11.2μm for black PCD down to 546 nm at the end. Although, the material that was removed during polishing was higher for the black variety of PCD but it had lower polishing rate of 4nm/hr than white PCD (13nm/hr) during chemo-mechanical polishing. Such differential polishing rate was due to harder top polished surface of the black diamond than the white diamond. The nanoindentation study on the polished PCD surfaces revealed that the black PCD has a final nanohardness of 32.58±1 GPa whereas the white variety PCD had a polished surface nanohardness of 28.5±2 GPa. More conversion of diamond surface into harder amorphous sp3 than softer graphite during polishing action may have resulted such slow rate of anisotropic polishing for black diamond than white diamond. Received on 17-08-2018 Accepted on 27-09-2018 Published on 12-11-2018
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黑色和白色CVD生长的多晶金刚石涂层的抛光
微波等离子体CVD生长可以产生黑色和白色品种的多晶金刚石(PCD),这取决于它们的生长纯度。这两种类型的pcd分别用机械抛光和化学机械抛光进行抛光。结果表明,白色PCD的初始粗糙度为2.21μm,经过70 h的联合抛光后可降至175 nm,而黑色PCD的初始粗糙度为11.2μm,经过85 h的联合抛光后可降至546 nm。虽然黑色PCD在抛光过程中去除的物质较多,但在化学-机械抛光过程中,黑色PCD的抛光速度为4nm/hr,低于白色PCD (13nm/hr)。这种抛光率的差异是由于黑钻石的顶部抛光表面比白钻石更硬。抛光后的PCD表面纳米压痕研究表明,黑色PCD的最终纳米硬度为32.58±1 GPa,而白色PCD的抛光表面纳米硬度为28.5±2 GPa。在抛光过程中,金刚石表面向较硬的非晶态sp3的转化比较软的石墨多,这可能导致黑金刚石的各向异性抛光速率比白金刚石慢。收稿日期:17-08-2018收稿日期:27-09-2018发布日期:12-11-2018
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