Multi-scale simulations of metal-semiconductor contacts for nano-MOSFETs

M. Aldegunde, K. Kalna, S. Hepplestone, P. Sushko
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引用次数: 1

Abstract

Multi-scale modelling of the electron transport via a metal-semiconductor interface is carried out by coupling ab initio calculations (DFT) with three-dimensional finite element ensemble Monte Carlo simulations. The results for the Mo/GaAs (001) interface show that variations of the electronic properties with the distance from the interface have a strong impact on the transport characteristics. In particular, the band gap narrowing near the interface lowers the interface resistivity by more than one order of magnitude with respect to that calculated for the idealised Schottky contact: from 2.1×10-8 Ω·cm2 to 4.7×10-10 Ω·cm2.
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纳米mosfet金属-半导体触点的多尺度模拟
利用从头算(DFT)和三维有限元系综蒙特卡罗模拟相结合的方法,建立了金属-半导体界面电子输运的多尺度模型。Mo/GaAs(001)界面的结果表明,电子性质随界面距离的变化对输运特性有很大的影响。特别是,相对于理想肖特基接触计算的界面电阻率,界面带隙的缩小使界面电阻率降低了一个数量级以上:从2.1×10-8 Ω·cm2到4.7×10-10 Ω·cm2。
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