A Direct Evidence of the Annealing Effect of Ionization Damage on Displacement Damage in NPN Transistors

Jianqun Yang, Gang Lv, Lei Dong, Pengfei Xu, Xingji Li
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Abstract

In this paper, based on the sequential irradiation of 40 MeV Si ions and Co-60 gamma ray, a direct evidence of the annealing effect of ionization damage on displacement damage in 2N2219 NPN bipolar junction transistors (BJTs) is investigated. Electrical parameters are measured using KEITHLEY 4200-SCS semiconductor characterization system during irradiation. The radiation induced defects are characterized by deep level transient spectroscopy (DLTS). The experimental results show that the degradation of current gain for the F2N2219 BJTs for the sum of the independent Co-60 gamma radiation and heavy ion irradiation is larger than that for the sequential irradiations, indicating the existence of significant synergistic effect. For lower fluence of 40 MeV Si ions, when the dose of Co-60 gamma ray is lower, the excess base current of the irradiated transistors by the sequential irradiation is less than one of the irradiated transistors by the independent 40 MeV Si ions. When fluence of 40 MeV Si ions is more than 6×l08/cm2, all the excess base current of the irradiated transistors by the sequential irradiation is less than one of the irradiated transistors by the independent 40 MeV Si ions. These results show that ionization damage on the transistors caused by the subsequent Co-60 gamma ray has an annealing effect on displacement damage caused by the 40 MeV Si ions. DLTS analyses show that the displacement defects especially in V2(-/0) centers caused by the 40 MeV Si ions are annealed due to the oxide charges induced by Co-60 gamma ray irradiations. Moreover, the fluence of the independent 40 MeV Si ions is the larger, the annealing effect of the displacement defects is the more obvious.
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电离损伤退火对NPN晶体管位移损伤影响的直接证据
本文基于40 MeV Si离子和Co-60 γ射线的连续辐照,研究了电离损伤对2N2219 NPN双极结晶体管(BJTs)位移损伤的退火效应。在辐照过程中使用KEITHLEY 4200-SCS半导体表征系统测量电参数。利用深能级瞬态光谱(DLTS)对辐射缺陷进行了表征。实验结果表明,独立Co-60 γ辐射和重离子辐照对F2N2219 BJTs电流增益的衰减大于连续辐照对电流增益的衰减,表明存在显著的协同效应。在较低的40 MeV Si离子影响下,当Co-60 γ射线剂量较低时,顺序辐照晶体管的过量基极电流小于独立的40 MeV Si离子辐照晶体管的一个基极电流。当40 MeV Si离子的辐照量大于6×l08/cm2时,顺序辐照晶体管的所有剩余基极电流小于独立的40 MeV Si离子辐照晶体管的一个基极电流。这些结果表明,后续Co-60 γ射线对晶体管造成的电离损伤对40 MeV Si离子造成的位移损伤具有退火效应。DLTS分析表明,40 MeV Si离子引起的位移缺陷,特别是V2(-/0)中心的位移缺陷是由于Co-60 γ射线辐照引起的氧化电荷而退火的。此外,独立的40 MeV Si离子的影响越大,位移缺陷的退火效果越明显。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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