A micropipe fabrication process

C. Kuo, T. Masuzawa, M. Fujino
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引用次数: 21

Abstract

A novel process for fabricating a micropipe has been developed. This process is based on electrochemical deposition of metal onto a core or a microelectrode which is prepared by WEDG (wire electrodischarge grinding). This procedure is simple and the entire process can be carried out automatically. Using this method, one can produce a high-accuracy micropipe with a length 100 times its inner diameter. A 3-mm-long micropipe of 23- mu m I.D. and 186- mu m O.D. with extremely high precision of straightness, roundness, and concentricity was successfully manufactured. Owing to the advantages of WEDG, the inner and outer shapes of the micropipe can be controlled independently, and produceable shapes include various irregular sections, such as triangular, rectangular, and polygonal sections.<>
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一种微管制造工艺
提出了一种制造微管的新工艺。该工艺是基于电化学沉积金属到芯或微电极上,这是由WEDG(线材电火花磨削)制备的。该程序简单,整个过程可以自动进行。利用这种方法,可以制作出长度为内径100倍的高精度微管。成功制造了直径23 μ m、外径186 μ m、直线度、圆度、同心度精度极高的3毫米长微管。由于WEDG的优点,微管的内外形状可以独立控制,可生产的形状包括各种不规则截面,如三角形、矩形和多边形截面。
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