G. Vidal-Álvarez, F. Torres, N. Barniol, O. Gottlieb
{"title":"The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams","authors":"G. Vidal-Álvarez, F. Torres, N. Barniol, O. Gottlieb","doi":"10.1109/DTIP.2014.7056690","DOIUrl":null,"url":null,"abstract":"The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams is analyzed both theoretically and experimentally. We show that the parasitic current strongly affects the shape of the nonlinear electrical response of the aforementioned devices. Specifically, we demonstrate that in the electrical measurement, the direction of the jumps from the different transitions between branches of stable solutions, depend on the value of the parasitic current and is independent of the direction of the jump in the mechanical domain.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2014.7056690","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams is analyzed both theoretically and experimentally. We show that the parasitic current strongly affects the shape of the nonlinear electrical response of the aforementioned devices. Specifically, we demonstrate that in the electrical measurement, the direction of the jumps from the different transitions between branches of stable solutions, depend on the value of the parasitic current and is independent of the direction of the jump in the mechanical domain.
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