D. Powell, K. Kalantar-zadeh, S. Ippolito, W. Wlodarski
{"title":"A layered SAW device based on ZnO/LiTaO/sub 3/ for liquid media sensing applications","authors":"D. Powell, K. Kalantar-zadeh, S. Ippolito, W. Wlodarski","doi":"10.1109/ULTSYM.2002.1193449","DOIUrl":null,"url":null,"abstract":"Surface Acoustic Wave (SAW) sensors comprising a zinc oxide guiding layer deposited on a 36/spl deg/-YX lithium tantalate substrate were developed. They were found to have greater mass sensitivity than other LiTaO/sub 3/ based SAW sensors, such as the -SiO/sub 2//LiTaO/sub 3/ configuration. In this paper, the fabrication of the ZnO/LiTaO/sub 3/ sensor is described and micro-characterisation of the deposited films is presented. Sensitivity of these devices to surface mass and dielectric perturbations is then presented, followed by an analysis of temperature stability.","PeriodicalId":378705,"journal":{"name":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"26","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2002.1193449","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 26
Abstract
Surface Acoustic Wave (SAW) sensors comprising a zinc oxide guiding layer deposited on a 36/spl deg/-YX lithium tantalate substrate were developed. They were found to have greater mass sensitivity than other LiTaO/sub 3/ based SAW sensors, such as the -SiO/sub 2//LiTaO/sub 3/ configuration. In this paper, the fabrication of the ZnO/LiTaO/sub 3/ sensor is described and micro-characterisation of the deposited films is presented. Sensitivity of these devices to surface mass and dielectric perturbations is then presented, followed by an analysis of temperature stability.
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