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2002 IEEE Ultrasonics Symposium, 2002. Proceedings.最新文献

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AlN epitaxial film with atomically flat surface for GHz-band SAW devices 用于ghz波段SAW器件的原子平面AlN外延膜
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1193370
K. Uehara, H. Nakamura, H. Nakase, K. Tsubouchi
We have successfully developed (00/spl middot/1) AlN film with atomically flat surface on (00/spl middot/1) sapphire substrate using metalorganic chemical vapor deposition (MO-CVD) method. The atomically flat surface of less than Ra=2/spl Aring/, Ra means mean roughness measured by atomic force microscope (AFM), within the thickness of 1.7 /spl mu/m has been achieved, whose conditions are high substrate temperature of 1200/spl deg/C, low pressure of 30Torr, low V-III ratio of 500 and the numerous flow rate of trimethylaluminum (TMA)-back-up H/sub 2/ gas of 5.0slm The temperature-coefficient-of-delay (TCD) of the fabricated surface-acoustic-wave (SAW) device on (00/spl middot/1)AlN/ (00/spl middot/1) Al/sub 2/O/sub 3/ combination with atomically flat surface are found to be 44.5 ppm//spl deg/C at kH=2.25 and 28.5 ppm//spl deg/C at kH=3.32, where kH is the normalized thickness by wave number, k is wave number and H is AlN film thickness. These measured TCD are agreed with simulated curve. AlN/Al/sub 2/O/sub 3/ combination with atomically flat surface has a potential for zero-TCD at kH=4.5.
利用金属有机化学气相沉积(MO-CVD)技术,在(00/spl middot/1)蓝宝石衬底上成功地制备了具有原子平面的(00/spl middot/1) AlN薄膜。在衬底温度1200/spl℃,低压30Torr,衬底温度1200/spl℃/℃的条件下,实现了小于Ra=2/spl Aring/的原子平面,Ra为原子力显微镜(AFM)测量的平均粗糙度,厚度在1.7 /spl mu/m以内。低V-III比500年的大量流量trimethylaluminum (TMA)备份H /子2 /天然气5.0 slm temperature-coefficient-of-delay (TCD)的声表面波(看到)设备(00 / spl压力/ 1)AlN / (00 / spl压力/ 1)Al /子2 / O /订阅3 /结合自动平面发现44.5 ppm / /在kH spl度/ C = 2.25和28.5 ppm / / spl kH = 3.32度/ C, kH是波数的归一化厚度,k是波数和H是膜厚度。实测TCD与模拟曲线吻合较好。具有原子平面的AlN/Al/sub 2/O/sub 3/组合在kH=4.5时具有零tcd的潜力。
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引用次数: 2
Non-cylindrical transmission focusing for large depth of field 非圆柱形传输聚焦大景深
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1192629
S. Umemura, T. Azuma, Y. Miwa, K. Sasaki, T. Sugiyama, T. Hayashi, H. Kuribara
In imaging with a microbubble contrast agent, which tends to make irreversible changes by transmission even at a low intensity, both transmission beamwidth and number of transmission per frame must be minimized. A transmission focusing technique based on a noncylindrical delay, which is applicable to a one-dimensional array, is proposed. Unlike X waves, the main beam propagates always coherently with the waves transmitted from the central part of the aperture. The non-cylindrical focusing delay was calculated by assuming a local focal length along the aperture, which increases gradually as the distance from the center increases. Numerical simulation of wave propagation predicted a large depth of field for a reasonably narrow main beam having longitudinally uniform intensity. The noncylindrical focusing was employed in a prototype beamformer, and the large depth of transmission field was confirmed with Shrielen measurements.
在使用微泡造影剂成像时,即使在低强度下也容易通过传输产生不可逆的变化,因此必须最小化传输波束宽度和每帧传输的数量。提出了一种适用于一维阵列的基于非圆柱延迟的传输聚焦技术。与X波不同的是,主波束总是与从光圈中心传播的波一致传播。非圆柱形聚焦延迟的计算方法是沿光圈假定一个局部焦距,该焦距随距中心距离的增加而逐渐增大。波传播的数值模拟预测了具有纵向均匀强度的相当窄的主波束的大景深。在原型波束形成器中采用了非圆柱形聚焦,并通过Shrielen测量证实了大透射场深度。
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引用次数: 3
Analysis of transducers arrays from piezoelectric hollow spheres 压电空心球体换能器阵列分析
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1192518
A. Hladky-Hennion, D. Markley, R. Newnham, R. Meyer, W. Hughes
This paper describes the design and the development of transducer arrays fabricated from miniature piezoceramic hollow spheres, the BBs. After the presentation of the fabrication procedure of the transducers, it presents the numerical tools used to model 2/spl times/2 and 4/spl times/4 transducer arrays in water. Numerical calculations give good agreement with the experimental results and provide physical insight for understanding the acoustic observations.
本文介绍了由微型压电陶瓷空心球(BBs)制成的换能器阵列的设计和研制。在介绍了换能器的制作过程之后,介绍了用于模拟水中2/spl倍/2和4/spl倍/4换能器阵列的数值工具。数值计算结果与实验结果吻合较好,为理解声波观测提供了物理视角。
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引用次数: 1
Depth-independent narrow beamwidth 3D ultrasonic image formation technique 与深度无关的窄波束宽度三维超声成像技术
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1192597
Z. M. Benenson, A. B. Elizarov, T. Yakovleva, W. O’Brien
A technique is proposed that generates a depth-independent and narrow beamwidth 3D ultrasonic image. A high-frequency, wide-bandwidth spherical transducer is scanned in 2D along Cartesian coordinates. The received wideband ultrasonic pulses are dynamically focused by means of correcting the spatial spectrum of signals for various temporal frequencies. The main procedures of the algorithm consist in the direct and inverse fast Fourier transforms by time and by two spatial Cartesian coordinates.
提出了一种产生与深度无关的窄波束宽三维超声图像的技术。高频、宽带宽球形换能器沿二维笛卡尔坐标扫描。接收到的宽带超声脉冲通过对不同时间频率信号的空间频谱进行校正来实现动态聚焦。该算法的主要步骤包括对时间和两个空间笛卡尔坐标的快速正反傅里叶变换。
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引用次数: 1
Holographic visualization of secondary ultrasonic waves radiated from micro-bubbles 微气泡辐射二次超声波的全息显示
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1192686
Y. Yamakoshi, Y. Ozawa, N. Masuda
When the micro-bubble oscillates under the ultrasonic wave, the bubble radiates secondary waves around it. This wave generates secondary Bjerknes force between the neighboring bubbles and the force assists inherent bubble movements such as bubble aggregation inside the ultrasonic wave field. In this paper, a novel technique to characterize the secondary ultrasonic wave from the bubbles is proposed. This method is based on the observation of fringe like pattern produced around the bubble of interest. This pattern is produced by micro bubbles which are trapped inside the interference wave field of incident wave and the secondary wave. The experiments are carried out by an ultrasonic wave contrast agent "Levovist" (SCHERING A.G. Germany). The fringe like patterns are observed for relative large aggregated bubbles.
当微气泡在超声波作用下振荡时,气泡周围会辐射出二次波。该波在相邻气泡之间产生次级比约克尼斯力,该力有助于固有的气泡运动,如超声波场内的气泡聚集。本文提出了一种表征气泡二次超声波的新方法。这种方法是基于观察感兴趣的气泡周围产生的条纹状图案。这种模式是由困在入射波和二次波干涉波场内的微气泡产生的。实验是用超声波造影剂“Levovist”(SCHERING A.G.德国)进行的。在较大的聚集气泡中观察到条纹状图案。
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引用次数: 2
Detection and mapping of thermal lesions using dual-mode ultrasound phased arrays 双模超声相控阵热病变的检测与制图
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1192566
H. Yao, P. Phukpattaranont, E. Ebbini
It has long been recognized that thermal lesions formed using high-intensity focused ultrasound (HIFU) exhibit nonlinear behavior that can be detected in pulse-echo ultrasound. Second harmonic imaging of freshly formed thermal lesions have consistently shown significant enhancement in their visualization confirming this nonlinear behavior. In this paper, we describe a post-beamforming nonlinear filtering algorithm based on a second-order Volterra filter (SVF) model that separates the linear and quadratic components of the echo signal leading to significant enhancement of lesion visualization. Images from ex vivo tissue samples are shown to demonstrate the level of contrast enhancement achieved with the SVF-based quadratic filter compared with standard echo and 2nd harmonic imaging results.
人们早就认识到,使用高强度聚焦超声(HIFU)形成的热损伤表现出非线性行为,可以在脉冲回波超声中检测到。新形成的热损伤的二次谐波成像一致显示出其可视化的显着增强,证实了这种非线性行为。在本文中,我们描述了一种基于二阶Volterra滤波器(SVF)模型的波束形成后非线性滤波算法,该算法分离了回波信号的线性和二次分量,从而显著增强了病变的可视化。来自离体组织样本的图像显示了与标准回波和二次谐波成像结果相比,基于svf的二次滤波器实现的对比度增强水平。
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引用次数: 8
Experimental evaluation of some possible nonlinearity indicators 一些可能的非线性指标的实验评价
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1192555
T. Bigelow, W. O’Brien
Due to regulatory reasons, the output levels of ultrasound sources for use in medical applications must be known. Currently, this is done by making focal pressure measurements for a very large number of drive voltage amplitudes and then linearly derating the measured pressure levels. In order to reduce calibration times, some have proposed to linearly extrapolate pressures rather than perform direct measurements. However, nonlinear propagation effects corrupt the linear extrapolation and derating procedure. Thus, a reliable indicator of nonlinearity is needed to identify when linear extrapolation/derating would be valid. In this study, eight different nonlinearity indicators were evaluated experimentally in terms of their correspondence to the linear extrapolation error. Spherically focused ultrasound transducers were selected and excited to test the indicators sensitivity to frequency (3 - 8 MHz), f/# (1 and 2), transducer diameter (1.905 and 5.08 cm), pulse duration (1 and 3 cycles), and pulse phase (0/spl deg/ and 180/spl deg/). None of the eight nonlinearity indicators yielded consistent results. The lack of consistency resulted from the competing effects of nonlinear absorption and asymmetric distortion, which have yet to be combined into a unified theory.
由于监管原因,必须知道用于医疗应用的超声源的输出水平。目前,这是通过对大量驱动电压幅值进行焦点压力测量,然后将测量的压力水平线性降额来实现的。为了减少校准时间,有些人建议线性外推压力,而不是进行直接测量。然而,非线性传播效应破坏了线性外推和降额过程。因此,需要一个可靠的非线性指标来确定线性外推/降额何时有效。在这项研究中,八个不同的非线性指标在实验方面评估其对应的线性外推误差。选取球形聚焦超声换能器进行激励,测试其对频率(3 ~ 8 MHz)、f/#(1和2)、换能器直径(1.905和5.08 cm)、脉冲持续时间(1和3个周期)和脉冲相位(0/声压度/和180/声压度/)的灵敏度。八个非线性指标中没有一个产生一致的结果。缺乏一致性是由于非线性吸收和不对称畸变的相互竞争的影响,这还没有被结合成一个统一的理论。
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引用次数: 0
Straight crested wave analysis of quartz MEMS ring electroded mesa resonators 石英MEMS环电极台面谐振器的直峰波分析
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1193564
Y. Yong, J. Vig, A. Ballato
An analytical technique for designing high Q, thickness shear micro electromechanical, ring electroded mesa quartz resonators is proposed. The method is demonstrated using two-dimensional straight crested wave analysis. The design method is based on the two characteristics of a stable resonator: (a) The mode is energy trapped and relatively isolated from its supports, and (b) the motional impedance of the mode is low. The root mean squares of vibration displacements are employed to characterize the modes of vibration, and the thickness shear mode has a large rms u/sub 1/ displacement in the x/sub 1/ direction (diagonal axis). The rms displacement is used to compare the energy trapping of the thickness shear mode as a function of the electrode and plate geometry. For each mode of vibration, the electric flux density D/sub 2/ is calculated at the quartz to electrode interface to yield the electric current at the electrodes. Given a constant driving voltage, the magnitude of the electric current is inversely proportional to the motional impedance. Hence the electric current for a mode as a function of the electrode and plate geometry is employed as a further means for comparing the merits of different resonator designs. Results are shown for a 1 GHz inverted mesa AT-cut resonator.
提出了一种设计高Q值、厚度剪切型微机电环电极台面石英谐振器的解析技术。用二维直峰波分析对该方法进行了验证。该设计方法基于稳定谐振器的两个特性:(a)模态被能量捕获并与其支撑相对隔离;(b)模态的运动阻抗低。采用振动位移均方根来表征振动模态,厚度剪切模态在x/sub - 1/方向(对角线轴)具有较大的均方根u/sub - 1/位移。均方根位移用于比较厚度剪切模式的能量捕获作为电极和板几何形状的函数。对于每种振动模式,计算石英与电极界面处的电通量密度D/sub 2/,以产生电极处的电流。给定恒定的驱动电压,电流的大小与运动阻抗成反比。因此,一种模式的电流作为电极和极板几何形状的函数被用作比较不同谐振器设计优点的进一步手段。结果显示了1 GHz倒台面AT-cut谐振器。
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引用次数: 8
Flow rate measurement using ultrasonic Doppler method with cavitation bubbles 超声多普勒空化气泡法测量流量
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1193458
Y. Koike, T. Tsuyoshi, H. Kikura, M. Aritomi, M. Mori
The current principle of the flow velocity measurement method is based on the detection of the echoes of ultrasonic pulse Doppler method (UDM). However, in some applications, for example, a flow rate measurement in clean water, any particle does not exist in the flow and hence, the conventional UDM cannot be applied. The authors group proposed to employ the ultrasonic cavitation bubbles as reflectors in the flow measurement by UDM. The low frequency Langevin transducer attached to the outside wall of the pipe produces the cavitation bubbles in the flow. Therefore, UDM can be applied to the flow rate measurement without any suspending particle tracers. In this report, applicability and accuracy of the flow rate measurement are investigated in the case of the cavitations bubbles as reflectors. The measurement system with the cavitation production system is also designed and fabricated.
目前的流速测量方法的原理是基于超声脉冲多普勒法(UDM)的回波检测。然而,在某些应用中,例如,在清洁水中的流量测量中,任何颗粒都不存在于流动中,因此,传统的UDM不能应用。本课题组提出将超声空化气泡作为反射体应用于UDM流量测量。附着在管道外壁的低频朗格万传感器在流动中产生空化气泡。因此,UDM可以应用于流量测量,不需要任何悬浮颗粒示踪剂。本文研究了以空化气泡为反射体的流量测量方法的适用性和准确性。设计并制作了带空化产生系统的测量系统。
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引用次数: 7
Numerical evaluation of ultrasonic pulse-echo subwavelength defect detection 超声脉冲回波亚波长缺陷检测的数值评价
Pub Date : 2002-12-01 DOI: 10.1109/ULTSYM.2002.1193504
Xiangtao Yin, S. A. Morris, W. O’Brien
The ultrasonic pulse-echo Backscattered Amplitude Integral (BAI)-mode imaging technique [UFFC Trans, 45:30, 1998] has been developed to detect small channel defects in flexible food package seals. This technique detects 38-/spl mu/m-diameter channels reliably and 6-/spl mu/m-diameter channels occasionally using a 17.3-MHz focused transducer in water (20/spl deg/C, /spl lambda/ /spl ap/ 86 /spl mu/m, total sample thickness 22 /spl mu/m). However, interaction between ultrasound and sample microstructure - the underlying detection mechanism is poorly understood. Experimental evidence showed at the subwavelength channel was fused inside the two binding trilaminate plastic package films. Each trilaminate film a three sublayers. Package sample impedance profiles along the ultrasound beam axis were examined. Although identical in nominal impedance properties before sealing, the two binding films showed an asymmetric impedance profile after sealing. A generalized impedance profile model was proposed. The defect detection behavior of the echo signal was investigated by solving the 2D linear acoustic wave equations in fluid with finite-difference time-domain method and the perfectly matched layer absorbing boundary. The normalized correlation coefficients between the simulated and the measured RF echo waveforms were greater than 95% for this generalized model.
超声脉冲回波后向散射振幅积分(BAI)模式成像技术[UFFC Trans, 45:30, 1998]已被开发用于检测柔性食品包装密封中的小通道缺陷。该技术在水中使用17.3 mhz聚焦传感器(20/spl°/C, /spl λ / /spl ap/ 86 /spl μ /m,总样品厚度22 /spl μ /m),可以可靠地检测直径为38 /spl μ /m的通道和偶尔检测直径为6 /spl μ /m的通道。然而,超声和样品微观结构之间的相互作用-潜在的检测机制尚不清楚。实验证据表明,亚波长通道在两个结合的三胺酸塑料封装薄膜中融合。每个三层膜有三个子层。测试了封装样品沿超声波束轴的阻抗分布。密封前两种结合膜的标称阻抗特性相同,但密封后两种结合膜的阻抗分布不对称。提出了一种广义阻抗剖面模型。采用时域有限差分法和完全匹配层吸收边界求解流体中的二维线性声波方程,研究了回波信号的缺陷检测行为。该广义模型模拟的射频回波波形与实测值的归一化相关系数均大于95%。
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引用次数: 0
期刊
2002 IEEE Ultrasonics Symposium, 2002. Proceedings.
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