Guohan Hu, Matthias Georg Gottwald, Qing He, Joon-Min Park, G. Lauer, Janusz J. Nowak, S. Brown, B. Doris, D. Edelstein, E. Evarts, Pouya Hashemi, B. Khan, Young-Hwan Kim, C. Kothandaraman, P. MarchackNathan, E. O'Sullivan, M. Reuter, R. Robertazzi, Jonathan Z. Sun, T. Suwannasiri, P. Trouilloud, Y. Zhu, D. Worledge
{"title":"Key parameters affecting STT-MRAM switching efficiency and improved device performance of 400°C-compatible p-MTJs","authors":"Guohan Hu, Matthias Georg Gottwald, Qing He, Joon-Min Park, G. Lauer, Janusz J. Nowak, S. Brown, B. Doris, D. Edelstein, E. Evarts, Pouya Hashemi, B. Khan, Young-Hwan Kim, C. Kothandaraman, P. MarchackNathan, E. O'Sullivan, M. Reuter, R. Robertazzi, Jonathan Z. Sun, T. Suwannasiri, P. Trouilloud, Y. Zhu, D. Worledge","doi":"10.1109/IEDM.2017.8268515","DOIUrl":null,"url":null,"abstract":"We report the impact of four key parameters on switching efficiency of STT-MRAM devices with perpendicular magnetic anisotropy: device size, device resistance-area product (RA), blanket film Gilbert damping constant (a), and process temperature. Performance degradation observed in 400°C-processed devices was eliminated by optimizing the perpendicular magnetic tunnel junction (p-MTJ) materials. Furthermore, 400°C-compatible double MTJs were developed for the first time and showed 1.5x improvement in switching efficiency compared to single MTJs with identical free layers.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE International Electron Devices Meeting (IEDM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2017.8268515","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 15
Abstract
We report the impact of four key parameters on switching efficiency of STT-MRAM devices with perpendicular magnetic anisotropy: device size, device resistance-area product (RA), blanket film Gilbert damping constant (a), and process temperature. Performance degradation observed in 400°C-processed devices was eliminated by optimizing the perpendicular magnetic tunnel junction (p-MTJ) materials. Furthermore, 400°C-compatible double MTJs were developed for the first time and showed 1.5x improvement in switching efficiency compared to single MTJs with identical free layers.