{"title":"Fundamentals of Circuit Edit","authors":"David J. Akerson","doi":"10.31399/asm.edfa.2023-2.p009","DOIUrl":null,"url":null,"abstract":"\n This article provides an introduction to focused ion beam (FIB) circuit editing, covering the basic process along with best practices and procedures.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2023-2.p009","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This article provides an introduction to focused ion beam (FIB) circuit editing, covering the basic process along with best practices and procedures.