Silicon germanium heterobipolar transistor for high speed operation

E. Kasper, A. Gruhle
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引用次数: 2

Abstract

The high frequency dilemma (limited high frequency operation only possible with high base sheet resistivities) of silicon bipolar junction transistors can be overcome by the application of heterostructures. In a first part we give an overview about the SiGe base heterobipolar-transistor (SiGe-HBT) concept and about the devices realized so far. In the second part we report about our SiGe-HBT device work based on Si-MBE grown structures. Experimental results obtained include transit frequencies up to 100 GHz, maximum oscillation frequencies up to 65 GHz, low base sheet resistivities (0.7 k/spl Omega/spl square/ to 3 k/spl Omega/spl square/), encouraging noise properties (<2 dB at 10 GHz) and successful tests in 24 GHz oscillators.<>
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用于高速运行的硅锗异质双极晶体管
异质结构的应用可以克服硅双极结晶体管的高频困境(只有在高基片电阻率的情况下才能实现有限的高频工作)。在第一部分中,我们概述了SiGe基极异质双极晶体管(SiGe- hbt)的概念和迄今为止实现的器件。在第二部分,我们报告了基于Si-MBE生长结构的SiGe-HBT器件的工作。实验结果包括传输频率高达100 GHz,最大振荡频率高达65 GHz,基片电阻率低(0.7 k/spl ω /spl平方/至3k /spl ω /spl平方/),噪声特性良好(>)
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