A high-speed mass flow sensor with heated silicon carbide bridges

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659782

C. Lyons, A. Friedberger, W. Welser, G. Muller, G. Krotz, R. Kassing

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引用次数: 24

Abstract

A novel type of micromachined thermal mass flow sensor has been developed which is characterised by enhanced mechanical and thermal stability. For its realisation /spl beta/-SiC films were heteroepitaxially deposited onto pre-processed silicon wafers. After structuring the surface /spl beta/-SiC films to form heater and temperature sensing elements, porous silicon was formed in predetermined parts of the silicon substrate to form flow channels. The so formed devices are able to detect bidirectional flows of air with a temporal resolution of 2-3 msec. Due to the excellent mechanical and thermal stability of the /spl beta/-SiC heater and temperature sensing elements, the devices are able to sustain extremely harsh environmental and operating conditions: firstly, flows of pressurised air could be sustained without inflicting mechanical damage to the micromachined /spl beta/-SiC bridges, secondly, several hours of thermal cleaning at white glow in ambient air could be endured before breakages due to thermal oxidation occurred.

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一种带有加热碳化硅桥的高速质量流量传感器

开发了一种新型的微机械热质量流量传感器，其特点是增强了机械和热稳定性。为了实现这一目标，我们将/spl β /-SiC薄膜异质外延地沉积在预处理过的硅片上。在构造表面/spl β /-SiC薄膜以形成加热器和感温元件后，在硅衬底的预定部分形成多孔硅以形成流道。这样形成的装置能够以2-3毫秒的时间分辨率检测空气的双向流动。由于/spl β /-SiC加热器和温度传感元件具有优异的机械和热稳定性，该设备能够承受极其恶劣的环境和操作条件:首先，可以维持压力空气的流动，而不会对微机械加工的/spl β /-SiC桥架造成机械损伤;其次，可以在环境空气中忍受几个小时的白光热清洗，以免因热氧化而发生断裂。

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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