Impact of Indium Chloride Treatment on the Properties of CuInSe2 Thin Films

Deewakar Poudel, Adam Masters, Benjamin Belfore, Elizabeth Palmiotti, A. Rockett, S. Marsillac
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Abstract

Copper Indium diselenide (CIS) semiconductor thin films were deposited by single-stage process. Following the deposition, annealing and recrystallization of CIS was carried out in the presence of InCl3 at different temperatures. Increase in grain size was observed by SEM in all cases. Increase in peak intensity was observed by XRD after treatment, correlating well with the SEM results. Measurements of the composition by both XRF and EDS indicate significant changes, notably a decrease in copper content. This will likely be an issue for device performance and will need to be addressed.
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氯化铟处理对CuInSe2薄膜性能的影响
采用单段法制备了铜铟二硒化半导体薄膜。沉积后,在不同温度下,在含InCl3的条件下对CIS进行退火和再结晶。扫描电镜观察到,所有样品的晶粒尺寸均有所增大。处理后的XRD峰强度增加,与SEM结果吻合较好。通过XRF和EDS对其成分进行了测量,发现了明显的变化,特别是铜含量的减少。这可能是设备性能的一个问题,需要解决。
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