Performance Comparison of CMOS and MEMS Based Thermal Energy Harvesters Using Finite Element Analysis

I. Sil, Sagar Mukherjee, Kalyan Biswas
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引用次数: 1

Abstract

In this paper, thermal energy harvesters (TEH) or Thermoelectric Power Generators (TPG) are designed to harvest electrical energy from heat. These Thermoelectric Power Generators are compatible to CMOS and MEMS fabrication technology. Detailed analysis of various models of thermoelectric power generators using FEA software are studied to achieve enhanced performance. Comparison has been made for both CMOS and MEMS based TPGs. From the analysis, it is observed that MEMS based TPG model produces 43.76% more output voltage than CMOS based TPG when the temperature difference across hot and cold junction is 5K. Analysis reveals that 91.23% increase in output power is also achieved with MEMS based TPG model. The design and simulation results provides a very good overview of the power generation capability of the TEG, which may be useful in future design of improved thermal energy harvesters.
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基于CMOS和MEMS的热能采集器性能比较的有限元分析
在本文中,热能收集器(TEH)或热电发电机(TPG)被设计用于从热量中收集电能。这些热电发电机兼容CMOS和MEMS制造技术。利用有限元分析软件对热电发电机的各种模型进行了详细的分析,以提高热电发电机的性能。对基于CMOS和MEMS的TPGs进行了比较。从分析中可以看出,当冷热端温差为5K时,基于MEMS的TPG模型比基于CMOS的TPG模型产生的输出电压高43.76%。分析表明,采用基于MEMS的TPG模型,输出功率也提高了91.23%。设计和仿真结果为TEG的发电能力提供了一个很好的概述,这可能对未来设计改进型热能采集器有用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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