A completely integrated 2 GHz VCO with post-processed Cu inductors

Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169) Pub Date : 2001-05-06 DOI:10.1109/CICC.2001.929845

J. Rogers, V. Levenets, C. Pawlowicz, N. G. Tarr, T. Smy, C. Plett

引用次数: 12

Abstract

A simple post-processing technique allowing Cu inductors to be added to integrated circuits is presented. The inductors use a 4 /spl mu/m thick Cu layer, and are formed over a 9 /spl mu/m thick polyimide dielectric. VCOs with Cu inductors gave a phase noise of -106 dBc/Hz at 100 kHz offset from a 2 GHz carrier. In contrast, an identical control circuit with Al inductors gave a phase noise of only -101 dBc/Hz at 100 kHz offset from a 1.8 GHz carrier and had higher power consumption.

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一个完全集成的2 GHz压控振荡器与后处理铜电感

提出了一种简单的后处理技术，可以在集成电路中加入铜电感。电感使用4 /spl μ m厚的Cu层，并在9 /spl μ m厚的聚酰亚胺电介质上形成。带Cu电感的vco在2ghz载波的100khz偏移时相位噪声为-106 dBc/Hz。相比之下，具有Al电感的相同控制电路在1.8 GHz载波的100 kHz偏移时相位噪声仅为-101 dBc/Hz，并且具有更高的功耗。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169)

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