MEMS Solutions in RF applications

Abstract

MEMS devices are ideal tuning element since in a non-50 Ohm system, equivalent series resistance (ESR) is the primary source of losses in a tuning system. MEMS have less than 20% of the ESR of solid state devices and are on par with the best fixed-value passive components. Figure 2 shows the usable Q of Cavendish RF MEMS device for the frequency range and associated capacitance state.