Uncooled array IR sensors integrated with CCD analog processor

Abstract

The technological methods proposed above allow one to prepare integrated structures of multi-element heat detectors and special CCD. In thin structure the sensitive film is isolated from the substrate by means of a supporting membrane or serves as the membrane itself. Such a technology seems to be advantageous in further development of different MEMS structures. There is created a completely monolithic pyroelectric array of sensors 100 X 100 micrometers 2 based on a heat-sensitive film construction lifted slightly above the crystal and also detector specimens with NETD less than 0.2 - 0.5 K (8 - 12 micrometers at 300 K and 20 - 50 Hz of modulation frequency). Derived measurements and investigations allowed us to choose the structure of 2D analogue CCD processor which now is under design and which will be integrated with pyroelectric membrane array.