An innovative approach to gas sensing using carbon nanotubes thin films: sensitivity, selectivity and stability response analysis

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI:10.1109/ICSENS.2003.1278972

C. Cantalini, L. Valentini, I. Armentano, J. Kenny, L. Lozzi, S. Santucci

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引用次数: 9

Abstract

We report that carbon nanotubes (CNTs) thin films have been successfully prepared as new NO/sub 2/ and H/sub 2/ gas sensors in the NO/sub 2/ concentration range 7 ppb - 7 ppm and H2 8.5ppm - 850 ppm respectively. 150 nm thick CNTs thin films, have been prepared by rf-PECVD on Si/Si/sub 3/N/sub 4/ substrates, provided with Pt interdigital sputtered electrodes, and post-annealed under controlled conditions. The electrical response has been investigated at different operating temperatures and gases over a period of 6 months. Sensitivity response analysis has demonstrated that CNTs are more responsive to NO/sub 2/ than H/sub 2/. By selecting suitable annealing conditions, the microstructure significantly changes enabling: to adjust the base line resistance of the film (i.e. the resistance in dry air) from 100 Ohms to several mega-Ohms, and to improve gas sensitivity. Selectivity test have highlighted negligible cross sensitivity effects to the detection of NO/sub 2/, when H/sub 2/ is the interfering gas. Long term stability test have shown a neglegible increase of the base line resistance and an improvement of the NO/sub 2/ sensitivity.

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一种利用碳纳米管薄膜进行气体传感的创新方法:灵敏度、选择性和稳定性响应分析

在NO/ sub2 /浓度为7ppb ~ 7ppm和H2为8.5ppm ~ 850ppm的条件下，成功制备了新型NO/ sub2 /和H/ sub2 /气体传感器。采用rf-PECVD在Si/Si/sub / 3/N/sub / 4/衬底上制备了150 nm厚的CNTs薄膜，并在控制条件下进行后退火。在6个月的时间里，研究了不同工作温度和气体下的电响应。灵敏度响应分析表明，CNTs对NO/sub 2/的响应比H/sub 2/的响应更灵敏。通过选择合适的退火条件，微观结构发生了显著变化，使薄膜的基线电阻(即干燥空气中的电阻)从100欧姆调整到几兆欧姆，并提高了气体灵敏度。选择性试验表明，当H/sub 2/为干扰气体时，对NO/sub 2/的交叉灵敏度可以忽略不计。长期稳定性试验表明，基线电阻的增加可以忽略不计，而NO/sub 2/灵敏度的提高可以忽略不计。

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Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)

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