High rejection UNII 5.2GHz wideband bulk acoustic wave filters using undoped single crystal AlN-on-SiC resonators

M. D. Hodge, R. Vetury, S. Gibb, M. Winters, P. Patel, M. Mclain, Ya Shen, D. Kim, Joe Jech, K. Fallon, R. Houlden, D. Aichele, J. Shealy
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引用次数: 12

Abstract

5.24GHz bulk acoustic wave filters, utilizing undoped single crystal aluminum nitride, are reported. The filters had an absolute 4dB bandwidth of 151 MHz, a minimum insertion loss of 2.82 dB and rejection >38 dB. Resonators show k2eff of 6.32%, Qrnax of 1523, and FOM of 96.
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使用未掺杂的单晶AlN-on-SiC谐振器的高抑制UNII 5.2GHz宽带体声波滤波器
报道了利用未掺杂的单晶氮化铝制备的5.24GHz体声波滤波器。该滤波器的绝对4dB带宽为151 MHz,最小插入损耗为2.82 dB,抑制>38 dB。谐振腔的k2eff为6.32%,Qrnax为1523,FOM为96。
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