Optimization of program and erase characteristics of two bit flash memory P-channel cell structure using TCAD

H. Hayashi, V. Axelrad, M. Mochizuki, T. Hayashi, T. Maruyama, Kazuya Suzuki, Y. Nagatomo
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Abstract

This paper presents the optimization of the two bit flash memory P-channel cell structure using efficient 2D write and erase model. Our proposed cell structure stores charge at either Source and/or Drain sides of the gate in an SiN film and is based on method of programming by DAHE and erasing by FN tunneling. It is found that expansion of cell window and the improvement of erase characteristic depend on the optimization of the gate-film overlap under gate of the SiN film.
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利用TCAD优化二位闪存p通道单元结构的程序和擦除特性
本文提出了一种利用高效二维写入和擦除模型对两位闪存p通道单元结构进行优化的方法。我们提出的电池结构是基于DAHE编程方法和FN隧道擦除方法,在SiN薄膜的栅极的源侧和/或漏侧存储电荷。研究发现,细胞窗的扩大和擦除特性的改善取决于优化SiN膜栅下的栅膜重叠。
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