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2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Physics of electronic transport in low-dimensionality materials for future FETs 未来场效应管低维材料中的电子输运物理学
M. Fischetti, W. Vandenberghe, Bo Fu, S. Narayanan, J. Kim, Z. Ong, A. Suarez-Negreira, C. Sachs, S. Aboud
We show that scaling rules, quantum confinement in thin bodies, and the resulting gate leakage render imperative the use of low-dimensionality materials as channels in devices scaled beyond the 10 nm gate length. We then consider a few examples of two-dimensional materials of great interest, graphene and bilayer graphene, and show how the dielectric environment (gate and interlayer insulators, nearby gates) has a dramatically strong effect on the electronic properties of systems such as supported graphene, nanoribbons, and graphene bilayers in which a Bose-Einstein exciton condensation has been predicted to occur at high temperature. Finally, we consider the novel concept of devices based on monolayer tin (`stannanane') as a topological insulator.
我们表明,缩放规则,薄体中的量子限制以及由此产生的栅极泄漏使得在超过10nm栅极长度的器件中使用低维材料作为通道势在必行。然后,我们考虑了一些非常感兴趣的二维材料,石墨烯和双层石墨烯的例子,并展示了介电环境(栅极和层间绝缘体,附近栅极)如何对支撑石墨烯,纳米带和石墨烯双层等系统的电子特性产生巨大的影响,其中已经预测在高温下会发生玻色-爱因斯坦激子凝聚。最后,我们考虑了基于单层锡(“锡烷”)作为拓扑绝缘体的器件的新概念。
{"title":"Physics of electronic transport in low-dimensionality materials for future FETs","authors":"M. Fischetti, W. Vandenberghe, Bo Fu, S. Narayanan, J. Kim, Z. Ong, A. Suarez-Negreira, C. Sachs, S. Aboud","doi":"10.1109/NANO.2015.7388720","DOIUrl":"https://doi.org/10.1109/NANO.2015.7388720","url":null,"abstract":"We show that scaling rules, quantum confinement in thin bodies, and the resulting gate leakage render imperative the use of low-dimensionality materials as channels in devices scaled beyond the 10 nm gate length. We then consider a few examples of two-dimensional materials of great interest, graphene and bilayer graphene, and show how the dielectric environment (gate and interlayer insulators, nearby gates) has a dramatically strong effect on the electronic properties of systems such as supported graphene, nanoribbons, and graphene bilayers in which a Bose-Einstein exciton condensation has been predicted to occur at high temperature. Finally, we consider the novel concept of devices based on monolayer tin (`stannanane') as a topological insulator.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-07-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131425409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Spatial distribution of state densities dominating strain sensitivity of carbon nanotubes 碳纳米管应变敏感性的态密度空间分布
M. Ohnishi, Ken Suzuki, H. Miura
In any electronic devices and sensors, internal strain is induced because of the thermal change or the lattice mismatch between different materials. It is, therefore, expected that when carbon nanotubes (CNTs) are used for electronic devices, their electronic properties are changed caused by the deformation. In this study, we study the mechanism of the change in the band gap of CNTs under the radial strain in terms of state density distribution. We found that the spatial distribution of the state density dominates its strain sensitivity, and thus, the strain sensitivity of electronic properties of CNTs. We also calculated the change in the current through the deformed CNTs. The founding indicates that the state density analysis should be useful for the development of novel electronic devices and nano electro mechanical systems and for assuring their reliable performance.
在任何电子器件和传感器中,由于不同材料之间的热变化或晶格不匹配而引起内部应变。因此,当碳纳米管(carbon nanotubes, CNTs)用于电子器件时,其电子性能会因变形而发生变化。在本研究中,我们从态密度分布的角度研究了径向应变下CNTs带隙变化的机理。我们发现态密度的空间分布支配着其应变灵敏度,因此,CNTs的电子性能的应变灵敏度。我们还计算了通过变形CNTs的电流变化。这一发现表明,态密度分析对新型电子器件和纳米机电系统的开发以及保证其可靠性能具有重要意义。
{"title":"Spatial distribution of state densities dominating strain sensitivity of carbon nanotubes","authors":"M. Ohnishi, Ken Suzuki, H. Miura","doi":"10.1109/SISPAD.2014.6931589","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931589","url":null,"abstract":"In any electronic devices and sensors, internal strain is induced because of the thermal change or the lattice mismatch between different materials. It is, therefore, expected that when carbon nanotubes (CNTs) are used for electronic devices, their electronic properties are changed caused by the deformation. In this study, we study the mechanism of the change in the band gap of CNTs under the radial strain in terms of state density distribution. We found that the spatial distribution of the state density dominates its strain sensitivity, and thus, the strain sensitivity of electronic properties of CNTs. We also calculated the change in the current through the deformed CNTs. The founding indicates that the state density analysis should be useful for the development of novel electronic devices and nano electro mechanical systems and for assuring their reliable performance.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115337918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A simulation analysis of backside-illuminated multi-collection-gate image sensor employing Monte Carlo method 用蒙特卡罗方法对背照式多采集门图像传感器进行了仿真分析
K. Shimonomura, V. Dao, T. Etoh, Y. Kamakura
Ultra-high speed image sensors have been developed and applied to various field of science and engineering. Toward the temporal resolution of 1ns, we have proposed a new structure of an image sensor, a backside-illuminated multi-collection-gate image sensor (BSI MCG image sensor). In order to evaluate the performance, it is necessary to simulate the paths of photoelectrons from the generation site to a collecting gate. The performance depends on several factors, including randomness in motion of the electrons which is considerable in the design of the sensor operating at the sub-nanosecond time scale. It is impossible to address this factor by using a device simulation based on the drift diffusion model. A Monte Carlo method is an effective tool to evaluate the effect of the randomness. In this paper, factors affecting the temporal resolution of the sensor are studied by using the Monte Carlo simulator.
超高速图像传感器已被开发并应用于各个科学和工程领域。为了达到1ns的时间分辨率,我们提出了一种新的图像传感器结构,即背照式多采集门图像传感器(BSI MCG图像传感器)。为了评价其性能,有必要模拟光电子从产生点到收集门的路径。性能取决于几个因素,包括电子运动的随机性,这在亚纳秒时间尺度下工作的传感器设计中是相当重要的。用基于漂移扩散模型的器件仿真来解决这个问题是不可能的。蒙特卡罗方法是评估随机性影响的有效工具。本文利用蒙特卡罗模拟器对影响传感器时间分辨率的因素进行了研究。
{"title":"A simulation analysis of backside-illuminated multi-collection-gate image sensor employing Monte Carlo method","authors":"K. Shimonomura, V. Dao, T. Etoh, Y. Kamakura","doi":"10.1109/SISPAD.2014.6931599","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931599","url":null,"abstract":"Ultra-high speed image sensors have been developed and applied to various field of science and engineering. Toward the temporal resolution of 1ns, we have proposed a new structure of an image sensor, a backside-illuminated multi-collection-gate image sensor (BSI MCG image sensor). In order to evaluate the performance, it is necessary to simulate the paths of photoelectrons from the generation site to a collecting gate. The performance depends on several factors, including randomness in motion of the electrons which is considerable in the design of the sensor operating at the sub-nanosecond time scale. It is impossible to address this factor by using a device simulation based on the drift diffusion model. A Monte Carlo method is an effective tool to evaluate the effect of the randomness. In this paper, factors affecting the temporal resolution of the sensor are studied by using the Monte Carlo simulator.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131498089","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Extended Hückel theory for quantum transport in magnetic tunnel junctions 磁隧道结中量子输运的扩展h<s:1> ckel理论
G. Shine, S. Manipatruni, A. Chaudhry, K. Saraswat, D. Nikonov, I. Young
Spin-resolved conductivities in magnetic tunnel junctions are calculated using a semiempirical tight-binding model and non-equilibrium Green's functions. The performance of half-metallic electrodes is studied by comparing conventional Fe-MgO-Fe structures to Co2FeAl-MgO-Co2FeAl structures. The results show higher tunneling magnetoresistance and resistance-area product for Co2FeAl devices across a wide bias range.
利用半经验紧密结合模型和非平衡格林函数计算了磁隧道结的自旋分辨电导率。通过比较传统的Fe-MgO-Fe结构和Co2FeAl-MgO-Co2FeAl结构,研究了半金属电极的性能。结果表明,在宽偏置范围内,Co2FeAl器件具有较高的隧道磁电阻和电阻面积积。
{"title":"Extended Hückel theory for quantum transport in magnetic tunnel junctions","authors":"G. Shine, S. Manipatruni, A. Chaudhry, K. Saraswat, D. Nikonov, I. Young","doi":"10.1109/SISPAD.2014.6931623","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931623","url":null,"abstract":"Spin-resolved conductivities in magnetic tunnel junctions are calculated using a semiempirical tight-binding model and non-equilibrium Green's functions. The performance of half-metallic electrodes is studied by comparing conventional Fe-MgO-Fe structures to Co2FeAl-MgO-Co2FeAl structures. The results show higher tunneling magnetoresistance and resistance-area product for Co2FeAl devices across a wide bias range.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131606807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Efficient and universal method to design multiple field limiting rings for power devices 一种高效通用的电力器件多场限环设计方法
M. Mochizuki, Hiroyuki Tanaka, H. Hayashi
For the first time, an efficient and universal method to design multiple field limiting rings (FLR) structure, which applicable to power devices with thin drift layer is proposed. Avalanche breakdown simulations of simplified structures are performed in each three area; the near main junction area, the outmost area, and the other. From simulation results, optimal spacing between each neighboring FLR is efficiently extracted. Phenomena related breakdown voltage determination in each area are also clarified. We demonstrate that the edge termination structures designed along our guidelines succeed to obtain the target blocking voltage in different 600 V class processes.
首次提出了一种适用于具有薄漂移层的功率器件的多场限流环(FLR)结构的高效通用设计方法。在三个区域分别进行了简化结构的雪崩击穿模拟;靠近主路口的区域,最外面的区域,以及其他。根据仿真结果,有效地提取了相邻FLR之间的最优间距。阐明了各区域击穿电压测定的相关现象。我们证明了沿我们的指南设计的边缘终端结构成功地在不同的600 V级工艺中获得目标阻断电压。
{"title":"Efficient and universal method to design multiple field limiting rings for power devices","authors":"M. Mochizuki, Hiroyuki Tanaka, H. Hayashi","doi":"10.1109/SISPAD.2014.6931562","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931562","url":null,"abstract":"For the first time, an efficient and universal method to design multiple field limiting rings (FLR) structure, which applicable to power devices with thin drift layer is proposed. Avalanche breakdown simulations of simplified structures are performed in each three area; the near main junction area, the outmost area, and the other. From simulation results, optimal spacing between each neighboring FLR is efficiently extracted. Phenomena related breakdown voltage determination in each area are also clarified. We demonstrate that the edge termination structures designed along our guidelines succeed to obtain the target blocking voltage in different 600 V class processes.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"63 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132980616","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Wigner Monte Carlo method for accurate semiconductor device simulation 精确模拟半导体器件的维格纳-蒙特卡罗方法
P. Ellinghaus, M. Nedjalkov, S. Selberherr
The Wigner equation can conveniently describe quantum transport problems in terms of particles evolving in the phase space. Improvements in the particle generation scheme of the Wigner Monte Carlo method are shown, which increase the accuracy of simulations as validated by comparison to exact solutions of the Schrödinger equation. Simulations with a time-varying potential are demonstrated and issues which arise in devices with an externally applied voltage between the contacts are treated, thereby further advancing the Wigner Monte Carlo method for the simulation of semiconductor devices.
维格纳方程可以方便地描述粒子在相空间中演化的量子输运问题。对Wigner - Monte Carlo方法的粒子生成方案进行了改进,通过与Schrödinger方程的精确解的比较,验证了该方法提高了模拟的精度。演示了具有时变电位的模拟,并处理了在触点之间具有外部施加电压的器件中出现的问题,从而进一步推进了用于半导体器件模拟的维格纳蒙特卡罗方法。
{"title":"The Wigner Monte Carlo method for accurate semiconductor device simulation","authors":"P. Ellinghaus, M. Nedjalkov, S. Selberherr","doi":"10.1109/SISPAD.2014.6931576","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931576","url":null,"abstract":"The Wigner equation can conveniently describe quantum transport problems in terms of particles evolving in the phase space. Improvements in the particle generation scheme of the Wigner Monte Carlo method are shown, which increase the accuracy of simulations as validated by comparison to exact solutions of the Schrödinger equation. Simulations with a time-varying potential are demonstrated and issues which arise in devices with an externally applied voltage between the contacts are treated, thereby further advancing the Wigner Monte Carlo method for the simulation of semiconductor devices.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134613700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Monte Carlo study of effective mobility in short channel FDSOI MOSFETs 短沟道FDSOI mosfet有效迁移率的蒙特卡罗研究
Sebastien Guarnay, F. Triozon, S. Martinie, Y. Niquet, A. Bournel
Quasi-ballistic electron transport in ultrashort FDSOI devices is analyzed using Multi-Subband Monte Carlo (MSMC) simulations, taking into account the main scattering mechanisms: phonons, surface roughness, and charged impurities in the access regions. In particular, the ballistic resistance (defined as the resistance of the channel in absence of scattering) was extracted from ballistic simulations, and shown to be in good agreement with an accurate analytical model including the contact resistance effect. The simulations show an apparent mobility degradation when the channel length decreases, comparable to that observed in experiments, without requiring any additional scattering mechanism in order to explain it.
利用多子带蒙特卡罗(MSMC)模拟分析了超短FDSOI器件中的准弹道电子输运,考虑了主要的散射机制:声子、表面粗糙度和通道区域的带电杂质。特别地,从弹道模拟中提取了弹道阻力(定义为无散射时通道的阻力),并与包含接触阻力效应的精确解析模型相吻合。模拟表明,当通道长度减小时,迁移率明显下降,与实验中观察到的结果相当,而不需要任何额外的散射机制来解释它。
{"title":"Monte Carlo study of effective mobility in short channel FDSOI MOSFETs","authors":"Sebastien Guarnay, F. Triozon, S. Martinie, Y. Niquet, A. Bournel","doi":"10.1109/SISPAD.2014.6931574","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931574","url":null,"abstract":"Quasi-ballistic electron transport in ultrashort FDSOI devices is analyzed using Multi-Subband Monte Carlo (MSMC) simulations, taking into account the main scattering mechanisms: phonons, surface roughness, and charged impurities in the access regions. In particular, the ballistic resistance (defined as the resistance of the channel in absence of scattering) was extracted from ballistic simulations, and shown to be in good agreement with an accurate analytical model including the contact resistance effect. The simulations show an apparent mobility degradation when the channel length decreases, comparable to that observed in experiments, without requiring any additional scattering mechanism in order to explain it.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115390888","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Compact modeling of carrier trapping for accurate prediction of frequency dependent circuit operation 载波捕获的紧凑建模,用于准确预测频率相关电路的工作
Y. Oodate, Y. Tanimoto, H. Tanoue, H. Kikuchihara, H. Miyamoto, H. Mattausch, M. Miura-Mattausch
We have investigated the influence of carrier traps on device characteristics in TFTs. In particular, our focus was given on transient characteristics influenced by carrier trapping during device operations. A compact model for circuit simulation of TFTs has been developed by considering the time constant of the trapping. The model was verified with measured frequency dependent TFT characteristics.
我们研究了载流子陷阱对tft中器件特性的影响。特别是,我们的重点是在器件运行过程中受载流子捕获影响的瞬态特性。考虑捕获的时间常数,建立了一个紧凑的TFTs电路仿真模型。用实测的频率相关TFT特性对模型进行了验证。
{"title":"Compact modeling of carrier trapping for accurate prediction of frequency dependent circuit operation","authors":"Y. Oodate, Y. Tanimoto, H. Tanoue, H. Kikuchihara, H. Miyamoto, H. Mattausch, M. Miura-Mattausch","doi":"10.1109/SISPAD.2014.6931630","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931630","url":null,"abstract":"We have investigated the influence of carrier traps on device characteristics in TFTs. In particular, our focus was given on transient characteristics influenced by carrier trapping during device operations. A compact model for circuit simulation of TFTs has been developed by considering the time constant of the trapping. The model was verified with measured frequency dependent TFT characteristics.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116020468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Physical modeling of time dependent dielectric breakdown (TDDB) of BEOL oxide using Monte Carlo particle simulation 基于蒙特卡罗粒子模拟的BEOL氧化物时间相关介电击穿物理模型
Seongwook Choi, Y. Park
A simulation method for the TDDB of the BEOL oxide is investigated based on the 3D particle Monte Carlo simulation model which can evaluate the random motion of Cu ions in the oxide. While the conventional models do not consider the percolation theory of the TDDB phenomenon, the new model is based on the percolation model so that more rigorous physics can be considered. Also, the new method enables the statistical analysis of TDDB for the BEOL oxide. From the simulation study, it turns out that the assumptions of the previous models result in inaccurate characteristics and mechanisms. We expect that the simulation framework proposed in this paper could not only lead us to deeper physical insights but also could be readily applied to predict the reliability under the realistic conditions of the interconnect such as the 3D damascene structures or Cu-liner systems and so on.
研究了一种基于三维粒子蒙特卡罗模拟模型的BEOL氧化物TDDB的模拟方法,该模型可以评估Cu离子在氧化物中的随机运动。传统模型没有考虑TDDB现象的渗流理论,而新模型基于渗流模型,可以考虑更严格的物理性质。此外,该方法还可以对BEOL氧化物的TDDB进行统计分析。仿真研究表明,以往模型的假设导致了不准确的特征和机理。我们期望本文提出的仿真框架不仅可以使我们对物理有更深入的认识,而且可以很容易地应用于预测互连体在实际条件下的可靠性,如三维damascene结构或Cu-liner系统等。
{"title":"Physical modeling of time dependent dielectric breakdown (TDDB) of BEOL oxide using Monte Carlo particle simulation","authors":"Seongwook Choi, Y. Park","doi":"10.1109/SISPAD.2014.6931587","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931587","url":null,"abstract":"A simulation method for the TDDB of the BEOL oxide is investigated based on the 3D particle Monte Carlo simulation model which can evaluate the random motion of Cu ions in the oxide. While the conventional models do not consider the percolation theory of the TDDB phenomenon, the new model is based on the percolation model so that more rigorous physics can be considered. Also, the new method enables the statistical analysis of TDDB for the BEOL oxide. From the simulation study, it turns out that the assumptions of the previous models result in inaccurate characteristics and mechanisms. We expect that the simulation framework proposed in this paper could not only lead us to deeper physical insights but also could be readily applied to predict the reliability under the realistic conditions of the interconnect such as the 3D damascene structures or Cu-liner systems and so on.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116299765","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A study of performance enhancement in uniaxial stressed silicon nanowire field effect transistors 单轴应力硅纳米线场效应晶体管的性能增强研究
Hyo-Eun Jung, W. J. Jeong, M. Shin
The performance of uniaxially strained Si nanowires (SiNWs) is investigated with the multiband k.p method. A rigorous quantum-mechanical calculation of hole current based on the non-equilibrium Green's function (NEGF) method is carried out. For both unstrained/strained-SiNWs, the necessity of using the tuned k.p parameters instead of the bulk k.p parameters for nano-scaled devices is examined by benchmarking with the tight-binding (TB) method. The on-current characteristics of the unstrained/strained-SiNWs are analyzed as a function of the aspect ratio of channel length (L) and width (W). The amount of on-current increase due to strain is quantitatively calculated, which shows an increasing behavior with respect to L/W.
采用多波段kp法研究了单轴应变硅纳米线的性能。基于非平衡格林函数(NEGF)方法,对空穴电流进行了严格的量子力学计算。对于非应变/应变sinws,通过紧结合(TB)方法的基准测试,研究了在纳米级器件中使用调谐k.p参数而不是体k.p参数的必要性。分析了非应变/应变sinws的导通特性与通道长度(L)和宽度(W)长宽比的关系,定量计算了应变引起的导通电流增加量,其随L/W的增大而增大。
{"title":"A study of performance enhancement in uniaxial stressed silicon nanowire field effect transistors","authors":"Hyo-Eun Jung, W. J. Jeong, M. Shin","doi":"10.1109/SISPAD.2014.6931595","DOIUrl":"https://doi.org/10.1109/SISPAD.2014.6931595","url":null,"abstract":"The performance of uniaxially strained Si nanowires (SiNWs) is investigated with the multiband k.p method. A rigorous quantum-mechanical calculation of hole current based on the non-equilibrium Green's function (NEGF) method is carried out. For both unstrained/strained-SiNWs, the necessity of using the tuned k.p parameters instead of the bulk k.p parameters for nano-scaled devices is examined by benchmarking with the tight-binding (TB) method. The on-current characteristics of the unstrained/strained-SiNWs are analyzed as a function of the aspect ratio of channel length (L) and width (W). The amount of on-current increase due to strain is quantitatively calculated, which shows an increasing behavior with respect to L/W.","PeriodicalId":101858,"journal":{"name":"2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132332505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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