Calibration of a contact probe for micro-nano CMM

Qiangxian Huang, J. Mei, Qiang Guo, Ruijun Li, Er-min Gong, Lijuan Chen
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引用次数: 1

Abstract

In order to obtain the transformation model between the three output signals of the contact probe of the Micro/nano coordinate measuring machine (CMM) and the three-dimensional space coordinates of the probe ball, a calibration model based on Taylor expansion is proposed. The probe consists of a 3-DOF coaxial beam sensor with the displacement measurement based on the principle of Michelson interference and two angles measurement based on the autocollimation principle, a suspension mechanism and a ruby ball. According to the relationship between the coordinate vector of the ball centre and the output signal vector of the probe, the calibration model based on Taylor expansion is proposed. The reliability of the model is verified by experiment tests. Performance tests show that the maximum calibration error of the model is 92 nm. The results demonstrate the calibration model features the feasibility and the validity, which can meet the calibration requirement of the Micro/nano CMM.
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微纳三坐标测量机接触式测头的标定
为了获得微纳坐标测量机(CMM)接触式测头的三个输出信号与测头球的三维空间坐标之间的转换模型,提出了一种基于Taylor展开的标定模型。探头由基于迈克尔逊干涉原理的位移测量和基于自准直原理的两角度测量的三自由度同轴光束传感器、悬挂机构和红宝石球组成。根据球心坐标矢量与探头输出信号矢量之间的关系,提出了基于泰勒展开的标定模型。通过实验验证了模型的可靠性。性能测试表明,该模型的最大标定误差为92 nm。结果表明,该标定模型具有可行性和有效性,能够满足微纳三坐标测量机的标定要求。
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