{"title":"Metal Vapor Active Element with Inductive Dispenser","authors":"K. Semenov, V. F. Fedorov, D. Shiyanov, M. Trigub","doi":"10.1109/EDM49804.2020.9153513","DOIUrl":null,"url":null,"abstract":"The paper presents the development of metal vapor active element with two energy sources. The first source provides the required vapor pressure of the work substance; the second source is used to pump active media. The resonant inverter was used for the inductive dispenser heating. The paper considers the design of the active element and the pilot plant which operability confirmed by waveforms of generation, current and voltage of a gas discharge tube. The inductive dispenser is used as a vaporizer of the working substance - metal atoms.","PeriodicalId":147681,"journal":{"name":"2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDM49804.2020.9153513","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The paper presents the development of metal vapor active element with two energy sources. The first source provides the required vapor pressure of the work substance; the second source is used to pump active media. The resonant inverter was used for the inductive dispenser heating. The paper considers the design of the active element and the pilot plant which operability confirmed by waveforms of generation, current and voltage of a gas discharge tube. The inductive dispenser is used as a vaporizer of the working substance - metal atoms.
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